压电复合薄膜的SAW器件杂波抑制及仿真方法  

Spurious Wave Suppression and its Simulation for Surface Acoustic Wave Devices with Piezoelectric Composite Film

作　　者：王吉芳 陈平静 曹稚颖 潘虹芝 董加和[1] 肖强 吴浩东[3] 陈正林 马晋毅[1,2] WANG Jifang;CHEN Pingjing;CAO Zhiying;PAN Hongzhi;DONG Jiahe;XIAO Qiang;WU Haodong;CHEN Zhenglin;MA Jinyi(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Science and Technology on Analog Integrated Circuit Laboratory,Chongqing 400060,China;Key Laboratory of Modern Acoustics,Ministry of Education,Department of Acoustic Science and Engineering,School of Physics,Nanjing University,Nanjing 210093,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]模拟集成电路国家重点实验室,重庆400060 [3]南京大学物理学院声学研究所,江苏南京210093

出　　处：《压电与声光》2024年第4期447-452,457,共7页Piezoelectrics & Acoustooptics

摘　　要：针对任意复杂膜系结构压电复合薄膜声表面波(SAW)器件横向杂波抑制及精确快速仿真方法,从数学上严格分析推导了有限长结构分层级联理论和色散2D-COM模型,可精确快速地计算压电复合薄膜SAW器件传播方向及孔径方向结构对杂波模式的影响,并通过色散2D-COM模型对SAW器件杂波抑制进行综合分析。通过对41°Y-X LiNbO_(3)/SiO_(2)/Si_poly/Si(111)复合衬底SAW谐振器的优化设计与研制,结果表明,设计优化结果与实验结果吻合较好,验证了该方法的有效性和可行性。To achieve spurious wave suppression and its simulation for piezoelectric surface acoustic wave(SAW) devices with arbitrary piezoelectric complex film structure,this study derived the equation of hierarchical cascade theory and a dispersion 2D-COM model of SAWs with a finite-length structure on the basis of rigorous mathematical analysis.The proposed approach can accurately and quickly calculate the influence of the propagation and aperture direction of the SAW device.The dispersion 2D-COM model facilitates the analysis of the suppression of spurious waves in SAW devices.Experimental results obtained from the design and implementation of the SAW filter with a 41°Y-X LiNbO_3/SiO_2/Si_poly/Si(111) structure were in good agreement with the simulation results,verifying the effectiveness and feasibility of the method.

关 键 词：压电复合薄膜 SAW器件 杂波抑制 分层级联 2D-COM模型 

分 类 号：TN65[电子电信—电路与系统]