基于多孔氧化铝的高品质因数QCM湿度传感器的研究  

High-Quality-Factor Quartz Crystal Microbalance Humidity Sensor Utilizing Porous Aluminum Oxide

作　　者：潘宇 蒋书波 陈惠 PAN Yu;JIANG Shubo;CHEN Hui(College of Electrical Engineering and Control Science,Nanjing Technology University,Nanjing 211816,China)

机构地区：[1]南京工业大学电气工程与控制科学学院,江苏南京211816

出　　处：《压电与声光》2024年第4期486-490,共5页Piezoelectrics & Acoustooptics

摘　　要：石英晶体微天平(QCM)传感器以频率形式输出信号,具有成本低、响应快、灵敏度高等优点,因而使用多孔α-Al_(2)O_(3)作为湿敏材料来提高QCM传感器对湿度的检测灵敏度。基于QCM传感原理,通过COMSOL软件研究不同结构尺寸对传感器谐振频率、品质因数、导纳的影响,优化传感器的几何参数。探究传感器在一定湿度范围内的灵敏度和动态特性,实验结果表明,该传感器具有显著的湿度辨别能力,最大频率响应可达到13 kHz,灵敏度为155 Hz/(%RH),响应、恢复时间分别为20 s和8 s。因此,使用多孔α-Al_(2)O_(3)作为湿敏材料的QCM传感器在湿度检测方面具有一定的可靠性和准确性。The output of quartz crystal microbalance(QCM) sensors is in the form of frequency signals.These sensors offer advantages such as low cost,fast response,and high sensitivity.This study utilized porous α-Al_2O_3,a moisture-sensitive material,to enhance the humidity detection sensitivity of QCM sensors.Simulations were performed using COMSOL,by applying the QCM sensing principle,to investigate the influence of various structural dimensions on the sensor's resonant frequency,quality factor,and admittance,while optimizing its geometric parameters.Subsequently,the sensitivity and dynamic characteristics of the sensor were examined over a specific humidity range.The experimental findings demonstrate the remarkable humidity discrimination capability of the sensor,with a maximum frequency response of 13 kHz,sensitivity of 155 Hz/(%RH),and response and recovery times of 20 s and 8 s,respectively.These results demonstrate the reliability and accuracy of the QCM sensor,utilizing porous α-Al_2O_(3) as the moisture-sensitive material,in humidity detection.

关 键 词：石英晶体微天平(QCM) α-Al_(2)O_(3) 湿度传感器 有限元仿真 品质因数 导纳 

分 类 号：TN384[电子电信—物理电子学] TN751.2