尺蠖式压电陶瓷电机的双模式驱动器开发与研究  

Development of Dual-Mode Driver for Inchworm Piezoelectric Ceramic Motor

作　　者：韩硕 杨晓峰[1,2] HAN Shuo;YANG Xiaofeng(State Key Lab.of Integrated Chips and Systems,School of Fudan University,Shanghai 200433,China;Shanghai Engineering Research Center of Ultra-Precision Motion Control and Measurement,School of Fudan University,Shanghai 200433,China)

机构地区：[1]复旦大学集成电路与系统国家重点实验室,上海200433 [2]复旦大学上海市超精密检测运动与控制中心,上海200433

出　　处：《压电与声光》2024年第4期562-569,共8页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划基金资助项目(2021YFA1200603);广东省实验室季华实验室项目资助(18002U1Z00)。

摘　　要：尺蠖式压电陶瓷电机具有小尺寸,长行程,纳米级定位和大推力的特性,被广泛应用于集成电路装备和精密运动平台中。然而目前受其驱动器约束,难以实现长行程运动时高精度定位、位移可控和速度可控,因而无法应用到具有高推力、高速度和长行程纳米级精度定位的集成电路7 nm工艺IC芯片检测装备中。提出并开发了一种双模式驱动器,基于电荷效应和应力效应原理分别建立了位移-电压和速度-频率的控制模型。采用滑模控制的方法解决了在双模式驱动器大电压输出时的纹波问题,提高了尺蠖式压电陶瓷电机输出的位移分辨率。通过实验对双模式驱动器进行了硬件性能和控制模式验证,同时验证了尺蠖式压电陶瓷电机的运动特性。Inchworm piezoelectric ceramic motors(IWPECMs),known for their small size,long stroke,nano-positioning,and large thrust characteristics,are widely used in integrated circuit equipment and precision motion platforms.However,current IWPECMs struggle to achieve high-precision positioning and controllable displacement and velocity over long-stroke movements with existing drivers.As a result,they cannot be applied to 7 nm technology integrated circuit(IC) chip testing equipment that requires high speed and nano-positioning.To address these issues,a dual-mode driver is proposed and developed.This dual-mode driver includes displacement-voltage and velocity-frequency modes,which are based on the principles of charge and stress effects,respectively.The sliding mode control(SMC) method is used to reduce the voltage ripple when the dual-mode driver outputs high voltage,thereby improving the displacement resolution of the IWPECM.Finally,the hardware performance and dual-mode control of the driver were verified through experiments,further testing the performance of IWPECM.

关 键 词：尺蠖式压电陶瓷电机 双模式驱动器 滑模控制 大电压低纹波 

分 类 号：TN384[电子电信—物理电子学]