电磁力驱动的光栅泰伯MOEMS加速度计设计与分析  

Design and Analysis of Grating-Talbot-based MOEMS Accelerometer Driven by Electromagnetic Force

作　　者：罗戴钟 徐浩东 金丽 李孟委[1,2] LUO Daizhong;XU Haodong;JIN Li;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051

出　　处：《舰船电子工程》2024年第6期204-208,共5页Ship Electronic Engineering

摘　　要：为提高MEMS加速度计灵敏度与线性工作范围,论文提出一种基于泰伯效应的双层衍射光栅透射式MOEMS加速度计,对其进行光学效应分析、结构与工艺设计。通过有限元分析,确定加速度计工作模态的固有频率为147.25Hz,结构灵敏度为11.5μm/g,光学检测线性范围为3.3μm。通过对结构施加预应力的方式,将加速度计线性工作范围提高4.75倍,为新型光栅加速度计的制造与测试奠定了理论基础。To improve the sensitivity and linear operation range of MEMS accelerometers,this paper proposes a MOEMS ac-celerometer based on the Talbot effect of double-layer diffraction grating,and conducts optical effect analysis,structural and pro-cessing design.Through finite element analysis,the natural frequency of the working mode of the accelerometer is determined to be 147.25 Hz,the structural sensitivity is 11.5μm/g,and optical sensitivity is 3.3μm.By applying pre-stress to the structure,the lin-ear working range of the accelerometer is increased by 4.75 times,laying a theoretical foundation for the manufacturing and measure-ment of the new grating accelerometer.

关 键 词：加速度计 泰伯效应 双层光栅 工艺设计 

分 类 号：TH824.4[机械工程—仪器科学与技术]