片上集成FMCW激光雷达研究进展(封面文章·特邀)  

Research progress of on-chip integrated FMCW LiDAR(cover paper·invited)

作　　者：朱精果 袁野 姜成昊 刘宇[1,2] 赵政伟 ZHU Jingguo;YUAN Ye;JIANG Chenghao;LIU Yu;ZHAO Zhengwei(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049

出　　处：《红外与激光工程》2024年第8期1-17,共17页Infrared and Laser Engineering

基　　金：激光雷达与器件技术重点实验室项目(LLD2023-009)。

摘　　要：随着硅基光电子集成技术快速发展,具有测距测速一体、探测精度高、抗干扰能力强的片上集成调频连续波(Frequency Modulated Continuous Wave,FMCW)激光雷达已成为研究热点,并在智能驾驶、航空航天、目标监测和公共安全等领域释放出越来越大的应用潜力。文中聚焦基于光学相控阵(Optical Phased Array,OPA)的片上集成FMCW激光雷达,介绍了系统工作原理及典型组成,针对国内外研究进展,概述分析了片上集成FMCW激光雷达的发展现状,同时从调频、发射、扫描、探测和处理等角度凝练了主要关键技术,并梳理了片上集成FMCW激光雷达在相关领域的应用前景和典型系统示例。最后,分析并展望了片上集成FMCW激光雷达面临的潜在挑战及发展趋势。Significance LiDAR detects targets by actively emitting and receiving lasers,obtaining information such as distance,speed,and orientation from the laser reflection echoes.It serves as a fundamental source for multidimensional environmental perception.In the context of detection systems,Time of Flight(TOF)LiDAR uses pulsed light signals to measure distances by precisely calculating the flight time of reflected light pulses.However,it has poor anti-interference,low detection sensitivity,and is susceptible to rain and fog,snow and other severe weather effects and other disadvantages;Frequency Modulated Continuous Wave(FMCW)combines continuous frequency modulation ranging in modern radar technology with laser detection technology.It uses linear frequency modulation signals to modulate the laser,and obtains target information by measuring the frequency of the beat frequency signal obtained by coupling the reflected signal and the local oscillator signal,because the coherent detection method can achieve a higher signal-to-noise ratio with lower laser emission power,making it a promising technology for future applications.In recent years,with the rapid development of siliconbased optoelectronic integration technology,on-chip integrated FMCW LiDAR,capable of integrated ranging,speed measurement,and high-precision long-distance detection,has become a research hotspot and has been used in fields such as intelligent driving,aerospace,target monitor,and public security.Progress In terms of scanning method,mechanical LiDAR uses mechanical rotation to achieve laser scanning,and uses a motor to drive the rotation of a single-point or multi-point ranging module.However,it is large in size,complex in assembly,and has a short lifespan,making it difficult to meet reliability and low-cost requirements.Dual-axis Micro-Electro-Mechanical Systems(MEMS)and transmissive poly-wedge prisms use single-point ranging combined with complex optical scanning systems.But face challenges such as limited detection range,poor environmental adaptabil

关 键 词：激光雷达 调频连续波 光学相控阵 片上集成 

分 类 号：TN958.98[电子电信—信号与信息处理]