可调谐超快激光贝塞尔光束加工方法研究  

Research on ultrafast laser processing method using tunable Bessel beam

作　　者：全宏升 马威峰 唐赞 张宗全 金昌骏 邱丽荣[1] 徐可米 赵维谦[1] QUAN Hongsheng;MA Weifeng;TANG Zan;ZHANG Zongquan;JIN Changjun;QIU Lirong;XU Kemi;ZHAO Weiqian(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院“复杂环境智能感测技术”工信部重点实验室,北京100081

出　　处：《红外与激光工程》2024年第8期56-64,共9页Infrared and Laser Engineering

基　　金：国家自然基金联合基金集成项目(U22A6006);山东省重大科技创新工程项目(2021CXGC010201)。

摘　　要：为了实现高效率和加工精度可灵活调节的超快激光微器件加工,提出了一种基于可调谐贝塞尔光束的超快激光加工方法。该方法通过调节可对初级贝塞尔光束压缩的双远心光学系统压缩比,实现了超快激光贝塞尔光束的中心主瓣半径和最大无衍射传输距离的灵活调节,其中不同压缩比的双远心光学系统通过闭环反馈控制的高分辨位移音圈致动器控制实现。理论分析和实验测试证实,在锥透镜(底角2°)和双远心光学系统(f_(1)=250 mm,f_(2)=36、18、9 mm)配合下,超快激光贝塞尔光束的中心主瓣半径和最大无衍射传输距离分别为3.73μm和5.28 mm,1.86μm和1.32 mm,0.93μm和0.33 mm。同时,设计了一套贝塞尔光束检测系统,可以实现对上述设计的可调谐贝塞尔光束的精确测量。最后对厚度为1 mm的熔融石英样品进行了打孔实验,实验结果表明熔融石英上的表面微孔直径与设计的贝塞尔光束的中心主瓣直径相符。该研究内容为实现高精密高效超快激光加工提供了一种新方法,具备工程化价值。Objective In order to realize ultrafast laser microdevice processing with high efficiency and flexibly adjustable processing accuracy,an ultrafast laser processing method based on tunable Bessel beam is proposed in this paper.This method achieves flexible adjustment of the central lobe radius and maximum nondiffracting propagation distance of the ultrafast laser Bessel beam by adjusting the compression ratios of the double telecentric optical system that can compress the primary Bessel beam,in which the double telecentric optical system with different compression ratios is realized by the control of the high-resolution displacement voice coil actuator with a closedloop feedback control.Theoretical analyses and experimental tests confirm that the central main lobe radius and the maximum nondiffracting propagation distance of ultrafast laser Bessel beams are 3.73μm and 5.28 mm,1.86μm and 1.32 mm,0.93μm and 0.33 mm,respectively,with the cooperation of a axicon lens(base angle of 2°)and a double telecentric optics system(f_(1)=250 mm,f_(2)=36 mm,18 mm,and 9 mm).Meanwhile,a Bessel beam detection system is designed to realize the accurate measurement of the tunable Bessel beams designed above.Methods The flexible adjustment of Bessel beam parameters can be realized by combining the axicon lens with a double telecentric optical system with different beam compression ratios.This adjustment is controlled by the high-resolution displacement voice coil actuator with a closed-loop feedback control.Meanwhile,theoretical calculation and numerical simulation are carried out to get the Bessel spatial light distribution of the Gaussian beam passing through the axicon lens and the double telecentric optical system with different beam compression ratios.In addition,a Bessel beam monitoring optical system was constructed by using a beam quality analyzer and a motion guide,and the above adjustable Bessel beam was tested.Results and Discussions The simulation analysis and experimental results indicate that the incident Gaussian be

关 键 词：超快激光加工 贝塞尔光束 双远心光学系统 音圈致动器 

分 类 号：TN249[电子电信—物理电子学]