非最小相位法向电磁应力驱动快速刀具伺服系统轨迹跟踪控制  

Trajectory tracking control for non-minimum phase normal-stressedelectromagnetic actuator-based fast tool servo system

作　　者：沈东冉 朱紫辉 黄鹏 朱利民[2] 朱志伟 Shen Dongran;Zhu Zihui;Huang Peng;Zhu Limin;Zhu Zhiwei(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094 [2]上海交通大学机械与动力工程学院,上海200240

出　　处：《南京理工大学学报》2024年第4期415-421,468,共8页Journal of Nanjing University of Science and Technology

基　　金：国家自然科学基金(U2013211);工信部制造业高质量发展专项(TC200H02J);中央高校基本科研业务费专项资金(30921013102)。

摘　　要：基于快速刀具伺服(FTS)的金刚石车削是复杂光学表面超精密制造的一种高效手段。为进一步提高具有非最小相位特征的电磁法应力驱动FTS的控制性能,将系统逆动力学补偿嵌入主控制回路中以改善被控对象动力学特征。对改善后的被控系统以比例微分积分(PID)和前馈补偿作为主控制器,并以基于内模原理的并联谐振控制器实现周期性轨迹的超高精度跟踪。考虑系统非最小相位特征,结合因子分解和镜像极点配置方法获得了系统稳定逆动力学模型。实验测试结果表明:该文所设计的控制方法,获得了1070 Hz(-3 dB)闭环带宽;100 Hz正弦轨迹实际跟踪误差小于±0.375%,并可对5 nm台阶轨迹进行稳定闭环跟踪,证明所设计的FTS控制系统可有效实现nm精度切削。Fast tool servo(FTS)diamond turning is effective for the ultra-precision manufacturing of complex-shaped optical surfaces.To further improve the control performance of a non-minimum phase normal-stressed electromagnetic FTS,a system dynamics inversion-based compensator is embedded in the main control-loop to improve the dynamics of the FTS.As for the improved system,a typical proportional-integral-derivative(PID)controller combining the feedforward compensator is introduced as the main controller.Furthermore,taking advantage of the internal model principle,a set of parallel resonant controllers are especially employed to ultra-precise track harmonic trajectories.Considering the non-minimum phase feature,a combination of the factorization and mirror pole placement method is conducted to obtain the stable inverse dynamics model of the system.The experimental results show that the inclusion of the dynamics inversion-based compensator can achieve a closed-loop bandwidth around 1070 Hz(-3 dB).The tracking error for a 100 Hz sinusoid trajectory is less than±0.375%,and a stable closed-loop tracking of a 5 nm stair trajectory demonstrates the capability of the FTS control system for nano-cutting.

关 键 词：快速刀具伺服 法向电磁应力驱动 非最小相位系统 逆动力学补偿 谐振控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]