全自动上下料方法在半导体设备中的应用  

Application of Fully Automatic Loading and Unloading Method in Semiconductor Equipment

作　　者：宋婉贞[1] 武震 谭立杰[1] 张永昌 SONG Wanzhen;WU Zhen;TAN Lijie;ZHANG Yongchang(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《自动化应用》2024年第15期123-125,129,共4页Automation Application

摘　　要：为了实现GPP半导体设备中的全自动上下料方法,该系统采用模块化设计,可便捷地安装于现有加工设备一侧或用于手动设备升级。上下料机构通过横向、纵向电机模组、吸盘、料盒及传感器的精密配合,实现了晶圆的自动取放与传输。控制系统以欧姆龙CP1H可编程控制器为核心,通过内置输入、输出功能及原点功能,确保了上下料流程的稳定与安全。方法上,全自动上下料流程包括取料、传输、放料3个主要步骤,并引入废料剔除功能以应对加工异常。取料过程通过纵向机械手的精确控制实现,传输过程依赖横向电机的准确驱动,而放料过程则需与承片台紧密配合。此外,系统还提供了综合测试功能,涵盖单轴测试与流程测试2个部分,以确保机构与控制系统的性能。通过全自动上下料机构及控制系统的应用,设备的换料周期由传统的25片延长至80~100片,提升了生产效率,减少了人工干预,降低了人工成本,使操作人员能够同时兼顾更多设备。In order to achieve a fully automatic loading and unloading method in GPP semiconductor equipment,the system adopts a modular design,which can be conveniently installed on one side of existing processing equipment or used for manual equipment upgrades.The loading and unloading mechanism achieves automatic picking and transportation of wafers through precise coordination of horizontal and vertical motor modules,suction cups,material boxes,and sensors.The control system is based on the Omron CP1H programmable controller,which ensures the stability and safety of the loading and unloading process through built-in input,output,and origin functions.In terms of methods,the fully automatic loading and unloading process includes three main steps:Material retrieval,transmission,and discharge,and introduces a waste removal function to deal with processing abnormalities.The material retrieval process is achieved through precise control of the longitudinal robotic arm,the transmission process relies on accurate driving of the transverse motor,and the material discharge process needs to be closely coordinated with the bearing platform.In addition,the system also provides comprehensive testing functions,covering both single axis testing and process testing,to ensure the performance of the mechanism and control system.Through the application of fully automatic loading and unloading mechanisms and control systems,the material replacement cycle of the equipment has been extended from the traditional 25 pieces to 80~100 pieces,improving production efficiency.The system reduces manual intervention,lowers labor costs,and allows operators to simultaneously consider more equipment.

关 键 词：全自动 堆叠式 可编程逻辑控制器 上下料方法 

分 类 号：TN873[电子电信—信息与通信工程]