红外自由曲面棱镜的高精度补偿加工方法  

High-Precision Compensation Machining Method for Infrared Freeform Surface Prism

作　　者：刘晓天 余俊[1,2] 王晓强[1,2] 何春伶 王一凡 文骁 王东方 王占山[1,2] Liu Xiaotian;Yu Jun;Wang Xiaoqiang;He Chunling;Wang Yifan;Wen Xiao;Wang Dongfang;Wang Zhanshan(Key Laboratory of Advanced Micro-Structured Materials,Ministry of Education,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China;Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China;Optoelectronic Manufacturing Engineering Center,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]同济大学物理科学与工程学院先进微结构材料教育部重点实验室,上海200092 [2]同济大学物理科学与工程学院精密光学工程技术研究所,上海200092 [3]中国科学院上海技术物理研究所,光电制造工程中心,上海200083

出　　处：《光学学报》2024年第13期213-221,共9页Acta Optica Sinica

基　　金：国家自然科学基金(62105244,U2030111);上海市自然科学基金(21ZR1473600);上海市产业协同创新(科技)项目(XTCX-KJ-2023-30);中国科学院青年创新促进会项目(Y1K4H0FKG1)。

摘　　要：为实现自由曲面棱镜的高精度制造,首先分析加工误差对自由曲面棱镜的成像性能影响,根据误差分析设计专用夹具,用于控制各曲面加工的中心位置。然后,提出一种基于在位与离线检测技术相结合的自由曲面棱镜高精度补偿车削加工方法,用以监测在加工过程中各阶段的定位误差量,并将误差量反馈于车削的补偿修正,这种方法极大地提升了自由曲面棱镜的加工精度。最后,对自由曲面棱镜台阶面和自由曲面棱镜分别进行了角度误差分析和成像性能检测,得到自由曲面棱镜台阶面的最大角度加工误差为0.03°,自由曲面棱镜在全视场实际成像效果清晰,证明了所提出的补偿加工方法的精度和可行性。Objective Achieving the requisite machining accuracy for freedom prisms to conform to design specifications is essential and necessitates the application of high-precision measurement techniques coupled with accurate compensation machining strategies. The incorporation of multiple freeform surfaces into a single optical element introduces a dual challenge in the machining process. This involves the precise compensation for individual surface errors and the resolution of interrelated positional accuracy errors among these surfaces. Failure to address these errors can significantly degrade the overall imaging performance of the optical system. To ensure the machining accuracy of freeform surface prisms meets design requirements, we propose a high-precision compensation machining method for freeform surface prisms, which combines in-situ and off-machine measurement techniques to achieve highly accurate measurement and precise compensation machining.Methods To address the machining error issues and enhance precision in the machining of freeform surface prisms, we introduce a novel high-precision compensation turning approach. This approach integrates both in-situ and off-machine measurement techniques, utilizing an analysis of machining errors on various surfaces to achieve effective error mitigation.By significantly reducing positional inaccuracies during the machining process, the proposed approach significantly elevates the imaging quality of the prisms. We initiate a detailed examination of the machining errors in infrared freeform surface prisms, leading to the development of a custom fixture tailored for single-point turning. The methodology incorporates three-coordinate off-machine measurement technology to assess angular and interfacial spacing discrepancies in prism blanks. The data is instrumental in establishing a model that facilitates compensation for the initial machining surfaces.Further, we contact the probe to fine-tune the initial turning orientation of the prism, ensuring precise machining of the i

关 键 词：光学设计 自由曲面棱镜 公差分析 在位与离线检测 高精度补偿 

分 类 号：O436[机械工程—光学工程]