An Approximation for Rapid Simulation of Thin-Film Bulk Acoustic Resonators(FBARs)with Sandwich-Layered Structure  

作　　者：Haoyu Huang Yibo Ge Xiangrong Xu Nian Li Zhenghua Qian 

机构地区：[1]AVIC Jincheng Nanjing Engineering Institute of Aircraft Systems,Nanjing 210016,China [2]State Key Laboratory of Mechanics and Control of Mechanical Structures,College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China

出　　处：《Acta Mechanica Solida Sinica》2023年第2期293-305,共13页固体力学学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(12061131013,11972276,12172171 and 12102183);the State Key Laboratory of Mechanics and Control of Mechanical Structures at NUAA(No.MCMS-E-0520K02);the Fundamental Research Funds for the Central Universities(NE2020002 and NS2019007);National Natural Science Foundation of China for Creative Research Groups(No.51921003);the Start-up Fund supported by NUAA,National Natural Science Foundation of Jiangsu Province(BK20211176);Local Science and Technology Development Fund Projects Guided by the Central Government(2021Szvup061);Jiangsu High-Level Innovative and Entrepreneurial Talents Introduction Plan(Shuangchuang Doctor Program,JSSCBS20210166);a project funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions(PAPD).

摘　　要：Thin-film bulk acoustic resonators(FBARs)operating with essentially thickness-extensional mode have been widely used in communication fields.In this paper,we provide a convenient means for analyzing FBARs with sandwich-layered structure by appropriately neglecting the high-order terms from 3D elasticity equations.First,for straight-crested waves,an approximate method is proposed,which can accurately describe the dispersion relation near the operating frequency range of an FBAR.Using the approximation,the optimum lateral size of a 2D model of frame-like FBAR is obtained,and the results are in good agreement with that obtained by commercial FEM software COMSOL.The approximation is further extended to variablecrested waves in order to analyze the 3D plate models for real devices.The mode shapes of 3D FBARs with and without frame-like structures are obtained.The results show that the approximation presented in this paper is of sufficient accuracy and can be used as an efficient tool for the analysis and design of FBARs.

关 键 词：Two-dimensional scalar differential equations FBAR COMSOL Layered structure 

分 类 号：TN751.2[电子电信—电路与系统]