多通道双晶单色器平行度测量与运动轨迹规划  

Parallelism measurement and trajectory planning of multi-channel double crystal monochromator

作　　者：鲁浩林 刘卯卯 何思宇 冯朝[1] 张小威[3] 唐琳[2] 何建华[2] 肖晓晖[1] LU Haolin;LIU Maomao;HE Siyu;FENG Zhao;ZHANG Xiaowei;TANG Lin;HE Jianhua;XIAO Xiaohui(School of Power and Mechanical Engineering,Wuhan University,Wuhan 430072,China;Advanced Light Source Research Center,Wuhan University,Wuhan 430072,China;Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]武汉大学动力与机械学院,湖北武汉430072 [2]武汉大学先进光源研究中心,湖北武汉430072 [3]中国科学院高能物理研究所,北京100049

出　　处：《光学精密工程》2024年第15期2374-2386,共13页Optics and Precision Engineering

基　　金：湖北省科技重大专项(No.2021AFB001)。

摘　　要：针对双转轮多通道双晶单色器的平行度误差补偿问题,提出一种基于光电自准直仪的多通道双晶单色器准静态双晶衍射面平行度测量方法以及一种S形曲线轨迹规划方法。分析多通道单色器的结构及运动特点,基于光电自准直仪提出多通道双晶单色器平行度测量系统的总体框架及测量具体流程。结合多通道双晶单色器运动特点,提出一种S形曲线轨迹规划方法,并基于平行度测量结果对单色器运动轨迹进行优化设计。最后,在搭建的实验平台上开展准静态平行度测量实验及运动轨迹跟踪实验。结果表明:所搭建的平行度测量系统的平行度分辨率达0.5″,相邻两组晶体角度跃迁差值在百角秒量级;所提S形曲线轨迹规划算法将轨迹跟踪误差抑制在6.1″,相比传统5阶多项式及未规划轨迹,跟踪误差分别降低58.7%和63.9%。实验结果验证了所提方法有效性,对改进双转轮多通道双晶单色器性能具有良好的实际应用价值。To address parallelism error compensation in a dual-rotation multi-channel double crystal monochromator(DCM),we propose a method using an autocollimator to measure the quasi-static parallelism of diffraction surfaces and an S-curve trajectory planning method.First,we analyze the structure and motion of the monochromator.Then,we present a measurement system framework using the autocollimator.We also propose an S-curve trajectory planning algorithm to optimize the motion trajectory based on parallelism measurements.Finally,experiments on the constructed platform show that the measurement system achieves a 0.5"resolution,with crystal angle transitions varying by hundreds of arcseconds.The S-curve planning algorithm reduces trajectory tracking error by 58.7%and 63.9%compared to a 5th order polynomial and unplanned trajectories,respectively,with a 6.1"tracking error.These results confirm the method's efficacy in enhancing the performance of the monochromator.

关 键 词：同步辐射X射线 双晶单色器 误差补偿 平行度测量 轨迹规划 

分 类 号：TH74[机械工程—光学工程] TP273[机械工程—仪器科学与技术]