改进分水岭算法的扫描电镜图像标定  

Scanning Electron Microscope Image Calibration with Improved Watershed Algorithm

作　　者：朱建鹏 王英 孙巍[2] 端方 王贤浩 杨明来 ZHU Jianpeng;WANG Ying;SUN Wei;DUAN Fang;WANG Xianhao;YANG Minglai(SJTU-Pinghu Institute of Intelligent Optoelectronics,Pinghu 314299,Zhejiang,China;School of Railway Transportation,Shanghai Institute of Technology,Shanghai 201418,China;Advanced Electronics Materials and Devices,Shanghai Jiao Tong University,Shanghai 200240,China;Carl Zeiss(Shanghai)Co.,Ltd.,Shanghai 200131,China)

机构地区：[1]上海交大-平湖智能光电研究院,浙江平湖314299 [2]上海应用技术大学轨道交通学院,上海201418 [3]上海交通大学先进电子材料与器件平台,上海200240 [4]卡尔蔡司(上海)管理有限公司,上海200131

出　　处：《实验室研究与探索》2024年第8期24-28,共5页Research and Exploration In Laboratory

基　　金：上海交通大学平湖智能光电研究院开放基金重点项目(2022SPI0E203)。

摘　　要：针对不同探测器模式下扫描电镜图像特征复杂且易受阴影干扰的问题,提出了基于改进分水岭算法的扫描电镜图像标定方法。首先,通过自适应滤波、梯度变换等预处理流程减少噪声影响,同时保留真实信息;然后,针对分水岭标记存在的阴影干扰问题,采用自适应改进方法,使得标记的获取更具普适性,可适用于不同的探测器模式。棋盘格样品测试结果表明,该方法在InLens和SE2探测器模式下表现良好,并在综合评价指标上明显优于其他标定方法。将标定结果按照参考标尺与人工测量数据进行对比,两者相对误差在7%以内。A novel approach for calibrating scanning electron microscopy(SEM)images is introduced.We leverage the enhanced watershed algorithm to mitigate the challenges posed by intricate image features and shadow disruptions encountered across various detector modes.Initially,noise interference is mitigated while preserving genuine data integrity through preprocessing methodologies encompassing adaptive filtering and gradient transformations.Subsequently,in order to counteract shadow distortions within watershed markers,the adaptive enhancement technique is implemented to ensure marker acquisition universality across diverse detector configurations.Notably,chessboard sample assessments reveal superior performance of the proposed method when InLens and SE2 detectors are applied,and surpasses conventional calibration techniques across comprehensive evaluation metrics.Comparative analyses of calibration measurements against reference standards and manual assessments demonstrate a negligible relative error of within 7%,attesting to the method’s exceptional accuracy and laying a robust foundation for the analysis of samples.

关 键 词：分水岭变换 扫描电镜 微观分析 图像处理 

分 类 号：TH742[机械工程—光学工程]