某FAB厂房结构微振动有限元计算与分析  

The Finite Element Calculation and Analysis of Micro-vibration of a FAB Plant Structure

作　　者：万曦[1] 代剑英 吴芳[3] Wan Xi;Dai Jianying;Wu Fang(Information Industry Electronics Eleventh Design and Research Institute Science and Technology Engineering Co.,Ltd.,Xi'an,China;China Northwest Architecture Design and Research Institute Co.,Ltd.,Xi'an,China;College of Water Conservancy and Civil Engineering,South China Agricultural University,Guangzhou,China)

机构地区：[1]信息产业电子第十一设计研究院科技工程股份有限公司,陕西西安 [2]中国建筑西北设计研究院有限公司,陕西西安 [3]华南农业大学,广东广州

出　　处：《科学技术创新》2024年第22期173-176,共4页Scientific and Technological Innovation

摘　　要：为研究电子厂房防微振结构设计方法,在对该厂区进行场地环境振动实测后,采用了有限元软件建模计算并分析了半导体厂房结构的微振动水平。结果发现:厂房二层各区域的振动预测均满足微振要求VC-B和VC-C标准;各测点的振动峰值主要集中在2 Hz、12.5 Hz、25 Hz三个频段附近。分析预测结果可为类似的项目提供经验并指导结构设计。In order to study the structural design method of electronic plant against micro-vibration,this paper carries out the site environmental vibration measurement of the plant,and analyzes the micro-vibration level of the semiconductor plant using finite element software.The results found that:the vibration prediction of each area on the second floor of the plant meets the micro-vibration requirements of VC-B and VC-C standards;the vibration peaks of each measurement point are mainly concentrated in the vicinity of the three frequency bands of 2 Hz,12.5 Hz and 25 Hz.The analysis and prediction results can provide experience for similar projects and guide the structural design.

关 键 词：有限元仿真 环境振动 电子厂房 

分 类 号：U231[交通运输工程—道路与铁道工程] U211.3