基于FBG的高温压力传感器设计与校准  

Design and Experimental Test of High Temperature Pressure Sensor Based on FBG

作　　者：张白莉 高震森 郭红英 ZHANG Baili;GAO Zhensen;GUO Hongying(Department of Electronics,Xinzhou Normal University,Xinzhou 034000,CHN;School of Information Engineering,Guangdong University of Technology,Guangzhou 510006,CHN;Key Laboratory of Photonic Technology for Integrated Communication and Sensing,Ministry of Education,Guangzhou 510006,CHN)

机构地区：[1]忻州师范学院电子系,山西忻州034000 [2]广东工业大学信息工程学院,广州510006 [3]通感融合光子技术教育部重点实验室,广州510006

出　　处：《半导体光电》2024年第4期561-567,共7页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(62375055);山西省高等学校教学改革创新项目(J2021573);山西省忻州市科技局项目(20220507)。

摘　　要：针对弹药热安全检测中压力检测的需求,设计了一种基于光纤光栅的高温压力传感器。通过深入研究传感构型的弹性形变对光纤光栅输出信号波长的影响和作用机制,设计了传感器封装模型结构,并对其内部参数进行了优化设计。应用有限元建立了传感器封装结构的三维立体模型,通过对模型施加10 MPa载荷,实现了模型的受压仿真,仿真结果验证了传感器压力转换结构设计的合理性。同时以薄板小挠度变形理论为基础,计算出传感器的理论压力灵敏度,设计了传感器的温度补偿方式,进行了不同温度环境下的压力校准实验,得出了传感器在不同温度的压力灵敏度变化趋势,证明了该传感器在100~450℃环境压力测量以及温度补偿方法的有效性。In this paper,a kind of high temperature pressure sensor based on fiber grating(FBG)is designed to meet the demand of pressure detection.Through analysis and comparison,suitable packaging materials and grating coating layers were selected,structural parameters were designed,and a three-dimensional model of the sensor packaging structure was established by finite element method(Ansys Workbench).The simulation of the model was realized by applying load.The simulation results verify the rationality of the design of the pressure transfer structure of the sensor.At the same time,based on the small deflection deformation theory of thin plate,the pressure sensitivity of the sensor is calculated,the temperature compensation method of the sensor is designed,the pressure and temperature calibration experiments are carried out,the pressure sensitivity of the sensor at different temperatures is analyzed,and the effectiveness of the sensor pressure measurement and temperature compensation method at 100~450℃is proved.

关 键 词：光纤光栅 高温压力传感器 结构设计 弹性膜片 温度补偿 

分 类 号：TN253[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]