电子级氯化氢纯化研究进展  

Advance in Purification Research of Electronic-grade Hydrogen Chloride

作　　者：王刚 任少科[1] 李子宽 祝全仁 赵鹏德 方建朝[1] 刘禹含 WANG Gang;REN Shaoke;LI Zikuan;ZHU Quanren;ZHAO Pengde;FANG Jianchao;LIU Yuhan(Zhonghao Guangming Research and Design Institute of Chemical Industry Co.,Ltd.,Dalian 116031,China)

机构地区：[1]中昊光明化工研究设计院有限公司,辽宁大连116031

出　　处：《低温与特气》2024年第4期1-5,共5页Low Temperature and Specialty Gases

摘　　要：电子级氯化氢广泛用于半导体行业中的单晶硅气相抛光和外延基座腐蚀工序。随着芯片制程的不断减小,对氯化氢纯度的要求越来越高,给电子级氯化氢的纯化工艺提出了新的挑战。综述了现阶段电子级氯化氢的纯化技术:包括冷凝、吸收、精馏、吸附、化学转化、膜分离和精密过滤,联用多种纯化技术是制备电子级氯化氢产品的首要选择。Electronic-grade hydrogen chloride is widely used in the vapor phase polishing processes and epitaxial base corrosion processes in the semiconductor industry.The requirement for the purity of electric-grade hydrogen chloride has become the increasingly stringent as the decrease of chip process,which creates new challenges to the purification technology of electronic-grade hydrogen chloride.It summarizes the purification techniques to hydrogen chloride at current stage including condensation,absorption,distillation,adsorption,chemical conversion,membrane separation and precision filtration.The multiple purification techniques need to be combined to obtain electronic-grade hydrogen chloride.

关 键 词：电子气体 氯化氢 纯化 

分 类 号：TQ117[化学工程—无机化工]