半导体晶圆静电吸盘表面陶瓷材料的制备方法分析  

Analysis of Preparation Methods for Ceramic Materials on the Surface of Semiconductor Wafer Electrostatic Suction Cups

作　　者：周磊 郑磊 ZHOU Lei;ZHENG Lei(Mingde Runhe Machinery Manufacturing(Tianjin)Co.,Ltd.,Tianjin 300350,China;Zhuhai Heze Technology Co.,Ltd.,Guangdong 519090,China)

机构地区：[1]明德润和机械制造(天津)有限公司,天津300350 [2]珠海和泽科技有限公司,广东519090

出　　处：《电子技术（上海）》2024年第6期348-350,共3页Electronic Technology

摘　　要：阐述一种优化半导体晶圆静电吸盘表面陶瓷材料的制备方法,在制作过程中结合计算机的深度学习以及神经网络技术,优化煅烧效果,提高煅烧效率和半导体晶圆静电吸盘表面陶瓷的制备质量。This paper describes a method for optimizing the preparation of ceramic materials on the surface of semiconductor wafer electrostatic suction cups.During the production process,computer deep learning and neural network technology are combined to optimize the calcination effect,improve calcination efficiency,and enhance the preparation quality of ceramic materials on the surface of semiconductor wafer electrostatic suction cups.

关 键 词：晶圆静电吸盘 陶瓷材料 图像编码器 硅片 金属材料 

分 类 号：TN405[电子电信—微电子学与固体电子学]