俄歇电子能谱测试中非导电粉末样品的荷电效应及消除方法  

Charge Effect and Elimination Method of Non-conductive Powder Samples in AES

作　　者：王鑫[1] Wang Xin(The 46th Research Institute,CETC,Tianjin 300200,China)

机构地区：[1]中国电子科技集团公司第四十六研究所,天津300220

出　　处：《福建分析测试》2024年第5期18-20,25,共4页Fujian Analysis & Testing

摘　　要：俄歇电子能谱在分析绝缘样品时,要得到正确的谱图,荷电效应是一个重要的影响因素。本文选取Al_(2)0_(3)粉末为例,提出了俄歇电子能谱分析Al_(2)0_(3)粉末样品的制样方法,通过对比几种减少荷电效应的实验,选取了以覆盖铝导电膜的方法进行实验。此方法流程简便、高效,降低了因荷电效应的影响,通过对Al203的标准摩尔比进行匹配,得到了比较好的匹配度。此方法检测结果较好。To obtain the correct spectrum of AES when analyzing insulating samples,the change effect is an important influ⁃encing factor.In the this paper,the AES sample preparation method for analyzing Al_(2)0_(3)powder was proposed.By compar⁃ing several experiments to reduce the charge effect,the method of covering aluminum conductive thin was selected.This method is simple efficient and reduces the influence of charge effect.By comparing the molar ratio Al_(2)0_(3),a good matching degree is obtained,and the detection results of this method are good.

关 键 词：俄歇电子能谱 荷电效应 Al203粉末 导电性 导电膜 

分 类 号：O562[理学—原子与分子物理]