倾斜结构对LiTaO_(3)-POI多层结构的SAW谐振器性能的影响  

The influence of tilted structure on the performance of LiTaO_(3)-POI multilayer SAW resonators

作　　者：杨幸 帅垚[2,3] 罗文博[2,3] 吴传贵[2,3] 张万里[2,3] YANG Xing;SHUAI Yao;LUO Wenbo;WU Chuangui;ZHANG Wanli(School of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065,China;Chongqing Institute of Microelectronics Industry Technology,University of Electronic Science and Technology of China,Chongqing 401332,China;State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]重庆邮电大学光电工程学院,重庆400065 [2]电子科技大学重庆微电子产业技术研究院,重庆401332 [3]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都611731

出　　处：《电子元件与材料》2024年第8期950-956,共7页Electronic Components And Materials

基　　金：四川省科技计划基金(2020YFJ0002)。

摘　　要：旨在探究倾斜结构在LiTaO_(3)-POI多层结构上对SAW谐振器横向模态杂散的影响。通过有限元方法(FEM),构建两种单端口谐振器模型,半周期P为0.98μm和1.42μm,孔径均为40P。然后对一系列倾斜角度(0°,2.5°,5°,7.5°,10°,12.5°,15°,17.5°,20°)进行了仿真分析,并完成版图绘制和流片测试。研究结果表明,实测数据与仿真结果之间具有高度一致性。在相同的半周期条件下,随着倾斜角度的增加,SAW谐振器对横向模态杂散抑制能力在一定范围内先增强后减弱。机电耦合系数随之逐渐减小,阻抗比的变化规律是先增大后降低,特别是在倾斜角度为2.5°和5°时,阻抗比达到最大值。这些规律揭示了倾斜结构对LiTaO_(3)-POI多层结构SAW谐振器横向模态杂散具有显著的抑制作用,为SAW滤波器的设计和制造提供了重要的理论依据和实践指导。研究结果表明,适当的倾斜角度能够有效优化SAW谐振器的性能,对于高性能射频滤波器的研制具有重要意义。The aim of this study is to investigate the effect of tilted structure on the transverse mode spuriousness of SAW resonators on LiTaO_(3)-POI multilayer substrates.Utilizing the finite element method(FEM),two single-port resonator models were developed with half-periods(P)of 0.98μm and 1.42μm and apertures size of 40P.Subsequently,a series of tilting angles of 0°,2.5°,5°,7.5°,10°,12.5°,15°,17.5°,and 20°were simulated and analyzed.Based on the simulation results,the resonator layout was drawn,and the tape-out was tested.The results show a high consistency between the measured and simulated data.Under the same half-period condition,the transverse mode spurious suppression ability of the SAW resonator is first enhanced and then weakened at larger tilt angle within a certain range.Simultaneously,the electromechanical coupling coefficient experiences a steady decline by escalating tilt angles.Oppositely,the impedance ratio exhibits an initial augmentation followed by diminish,reaching a maximum value at tilt angles of precisely 2.5°and 5°,where resonator performance is optimized.In summary,the tilt angle has a significant suppression effect on the transverse modal spurious of the LiTaO_(3)-POI multilayer structured SAW resonator,which provides an important theoretical basis and practical guidance for the design and fabrication of SAW filters.The study concludes that an appropriate tilt angle can effectively enhance the performance of the SAW resonators,which is of great significance for the development of high-performance radio frequency(RF)filters.

关 键 词：LiTaO_(3)-POI多层结构 倾斜结构 机电耦合系数 阻抗比 

分 类 号：TN384[电子电信—物理电子学] TN65TN713.2