湿法磷酸除砷制备电子级磷酸研究进展  

Research Progress on Preparation of Electronic Grade Phosphoric Acid by Removing Arsenic from Wet-process Phosphoric Acid

作　　者：肖睿 李韬 任美洁 黄一敏 宁平[1,3] 刘繁松 XIAO Rui;LI Tao;REN Meijie;HUANG Yimin;NING Ping;LIU Fansong(School of Environmental Science and Engineering,Kunming University of Science and Technology,Kunming 650000,China;The Seventh Geological Brigdade of Jiangxi Bureau of Geology,Ganzhou 341000,China;National-Regional Engineering Center for Recovery of Waste Gases from Metallurgical and Chemical Industries,Kunming 650000,China)

机构地区：[1]昆明理工大学环境科学与工程学院,云南昆明650000 [2]江西省地质局第七地质大队,江西赣州341000 [3]冶金及化工行业废气资源化国家地方联合工程研究中心,云南昆明650000

出　　处：《湿法冶金》2024年第5期504-512,共9页Hydrometallurgy of China

摘　　要：湿法磷酸深度脱砷制备电子级磷酸是高质量发展磷化工行业并推动磷化工行业技术转型的重要技术环节。电子级磷酸要求砷质量分数低于1×10^(-7) kg/kg,但因砷和磷的理化参数相似,因此如何实现从磷酸中深度分离砷成为了制备电子级磷酸的关键。系统梳理了国际和国内对电子级磷酸产品的主要质量标准,并概述了砷对电子级磷酸蚀刻微电子元件的危害。针对湿法磷酸深度除砷技术,重点总结了化学沉淀法、结晶法、电沉积法、电渗析法和吸附法的研究进展和优缺点,并展望了湿法磷酸深度除砷制备电子级磷酸技术的发展趋势。The preparation of electronic grade phosphoric acid by deep removing arsenic from wet-process phosphoric acid is an important technical link to develop phosphorus chemical industry with high quality and promote the technological transformation of phosphorus chemical industry.Electronic grade phosphoric acid requires a mass fraction of arsenic less than 1×10^(-7) kg/kg,but because the physicochemical parameters of arsenic and phosphorus are similar,how to achieve the deep separation of arsenic from phosphoric acid has become the key to the preparation of electronic grade phosphoric acid.In this paper,the main international and domestic quality standards for electronic grade phosphoric acid products are systematically reviewed,and the harm of arsenic to electronic grade phosphoric acid etched microelectronic components is summarized.The research progress,advantages and disadvantages of chemical precipitation,crystallization,electrodeposition,electrodialysis and adsorption are summarized,and the development trend of electron grade phosphoric acid prepared by wet phosphoric acid is prospected.

关 键 词：湿法磷酸 砷 深度脱除 电子级磷酸 制备 危害 研究进展 

分 类 号：TF803.2[冶金工程—有色金属冶金] TQ126.44[化学工程—无机化工]