1280×1024元InAs/GaSb II类超晶格中/中波双色红外焦平面探测器  

1280×1024 dual-color mid-wavelength infrared InAs/GaSb superlattice focal plane arrays

作　　者：白治中[1] 黄敏 徐志成[1] 周易[1] 梁钊铭 姚华城 陈洪雷[1] 丁瑞军[1] 陈建新[1] BAI Zhi-Zhong;HUANG Ming;XU Zhi-Cheng;ZHOU Yi;LIANG-Zhao Ming;YAO Hua-Cheng;CHEN Hong-Lei;DING Rui-Jun;CHEN Jian-Xin(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《红外与毫米波学报》2024年第4期437-441,共5页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金资助项目(62004205,62104236,62104237,62222412);国家重点研发计划项目(2022YFB3606800);上海市启明星培育项目扬帆专项(21YF1455000,22YF1455800);中国科学院上海技术物理研究所创新专项基金资助项目(CX-455)。

摘　　要：本文报道了1280×1024元InAs/GaSb II类超晶格中/中波双色红外焦平面阵列探测器的研究结果。探测器采用PN-NP叠层双色外延结构,信号提取采用叠层双色结构和顺序读出方式。运用分子束外延技术在GaSb衬底上生长超晶格材料,双波段红外吸收区的超晶格周期结构分别为中波1:6 ML InAs/7 ML GaSb和中波2:9 ML InAs/7 ML GaSb。焦平面阵列像元中心距为12μm。在80 K时测试,器件双波段的工作谱段为中波1:3~4μm,中波2:3.8~5.2μm。中波1器件平均峰值探测率达到6.32×10^(11) cm·Hz^(1/2)W^(-1),中波2器件平均峰值探测率达到2.84×10^(11) cm·Hz^(1/2)W^(-1)。红外焦平面偏压调节成像测试得到清晰的双波段成像。本文是国内首次报道1280×1024规模InAs/GaSb II类超晶格中/中波双色红外焦平面探测器。In this paper,we report research results of 1280×1024 dual-color mid-wavelength infrared InAs/GaSb superlattice focal plane arrays.The detector structure is PN-NP epitaxial multilayer and the signal is read out by sequential mode.The superlattice structure was grown on GaSb substrate using molecular beam epitaxy(MBE)technology.The respective structures of each absorption region are Mid-Wavelength 1(MW1):6 ML(InAs)/7 ML(GaSb)and Mid-Wavelength 2(MW2):9 ML(InAs)/7 ML(GaSb).The pixel center distance of the detector is 12μm.At 80 K measurements,the detector has spectral response wavelength of 3-4μm and 3.8-5.2μm respectively.The MW1 detector has a peak detectivity of 6.32×10^(11) cm·Hz^(1/2)W^(-1).The MW2 detector has a peak detectivity of 2.84×10^(11) cm·Hz^(1/2)W^(-1).Infrared images of both wavebands have been taken using infrared imaging test by adjusting the device voltage bias.It’s the first time that a 1280×1024 InAs/GaSb Type II superlattice mid-wave length two-color infrared focal plane detector has been reported in China.

关 键 词：焦平面 INAS/GASB 超晶格 双色 

分 类 号：TN304.2[电子电信—物理电子学] TN305