等离子体处理制备柔性低损耗ABS/Ag太赫兹空芯波导及其传输可靠性研究  

Preparation of flexible low-loss ABS/Ag-coated terahertz hollowwaveguide by plasma treatment and study on its transmissionreliability

作　　者：刘晟 沈圆杰 侯广宁 查志鹏 朱怡臻 余烁颖 张擎天 赵强[1] 刘少华[1] 敬承斌[1] 褚君浩[1] LIU Sheng;SHEN Yuan-Jie;HOU Guang-Ning;ZHA Zhi-Peng;ZHU Yi-Zhen;YU Shuo-Ying;ZHANG Qing-Tian;ZHAO Qiang;LIU Shao-Hua;JING Cheng-Bin;CHU Jun-Hao(Engineering Research Center for Nanophotonics and Advanced Instrument of Ministry of Education,School of Physics and Electronic Science,East China Normal University,Shanghai 200241,China)

机构地区：[1]华东师范大学物理与电子科学学院纳光电集成与先进装备教育部工程研究中心,上海200241

出　　处：《红外与毫米波学报》2024年第4期533-540,共8页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(61775060)。

摘　　要：等离子体处理ABS管提升了ABS/Ag镀层太赫兹空芯波导的性能。胶带法测试结果表明,等离子体处理后,银镀层的附着力由5级提升至2级。等离子体处理后的ABS管内表面银层的均匀性和致密度更高,高质量的银层有利于降低波导的损耗。未经等离子体处理的4.2 mm内径的ABS/Ag镀层空芯波导在0.3 THz和0.1 THz时的直线损耗分别为0.72 dB/m和1.47 dB/m,等离子体处理后其损耗分别降至0.70 dB/m和1.44 dB/m,且波导能够在冷热环境中稳定传输太赫兹波。等离子体处理后的样品在超过200小时的湿热老化和16次的高低温循环老化试验后直线损耗升高小于0.1 dB/m,而未经等离子体处理的样品的损耗升高大于1 dB/m。研究结果表明,等离子体处理后的ABS/Ag镀层太赫兹空芯波导损耗更低、传输可靠性更高、耐老化性更好,可用于构建下一代通信、传感及太赫兹成像系统等。The performance of ABS/Ag-coated terahertz hollow waveguide(HWG)was improved through plasma treatment of the ABS structural tube.The adhesion of the silver(Ag)film to the ABS tube was enhanced from level 5 to level 2 after plasma treatment.The 4.2 mm bore waveguide sample treated with plasma has a more uniform and denser silver film than the untreated sample,which contributes to the reduction of transmission losses from 0.72 dB/m to 0.70 dB/m at 0.3 THz and 1.47 dB/m to 1.44 dB/m at 0.1 THz,respectively.After 200 hours of hydrothermal aging and 16 cycles of high and low temperature cycling testing,the straight loss of the HWG sample treated with plasma increased by less than 0.1 dB/m,while the untreated sample underwent an increase of more than 1.0 dB/m.The results indicate that the ABS/Ag-coated HWG fabricated by plasma treatment has lower loss,higher reliability and better antiaging performance compared with the untreated sample.It can be potentially used for establishment of next-generation communication,sensing,and THz imaging systems.

关 键 词：太赫兹传输 太赫兹波导 空芯波导 等离子体处理 

分 类 号：TN252[电子电信—物理电子学]