三层液精炼法提纯多晶硅的研究  

Removal of Boron and Phosphorus from Silicon by Three-layer Refining

作　　者：李翔 袁亮 李克帆 纪睿 展亦馨 唐恺 LI Xiang;YUAN Liang;LI Kefan;JI Rui;ZHAN Yixin;TANG Kai(School of Energy and Power Engineering,Jiangsu University,Zhenjiang 212013,China;Taizhou DongBo New Materials Co.,Ltd.,Taizhou 225300,China;SINTEF Industry,Trondheim N-7465,Norway)

机构地区：[1]江苏大学能源与动力工程学院,江苏镇江212013 [2]泰州东博新材料有限公司,山东泰州225300 [3]挪威科技工业研究院,挪威特隆赫姆N-7465

出　　处：《有色金属工程》2024年第10期67-72,共6页Nonferrous Metals Engineering

基　　金：江苏省博士后科研资助计划项目(2021K180B);泰州市科技支撑计划项目(TS202202);江苏大学高级人才科研启动基金(18JDG015)。

摘　　要：在高温下利用密度差别,以熔硅、熔渣和熔铁(或铜)构建Si/Slag/Me三层液体系。冶金硅中的B和P杂质扩散到熔渣和底层金属中,达到提纯冶金硅的目的。热力学计算结果证明了这种方法具有可行性。实验研究分析了底层金属类型、炉渣成分及反应温度对B和P去除率的影响。结果表明:底层金属可有效吸收冶金硅中的P,其中铁比铜有更好的P吸收效果。底层金属对B的吸收效果不佳,B的去除主要归功于造渣提纯过程。在炉渣中加入10 wt%的CaF_(2),降低了渣黏度,可显著提高B和P的去除率。1600~1700℃温度范围内,提高反应温度有利于B的去除,对P的去除无显著作用。A new refining concept aims to remove both B and P simultaneously in silicon has been proposed in Si/Slag/Me(Me:Fe or Cu)system.Both liquid Si and liquid Fe/Cu phases are separated by the molten slag phase spontaneously based on their physicochemical properties.Equilibrium evaluations indicate that both the B and P,the most difficult impurities to be removed from ultra-pure silicon,can be redistributed to the slag and another metal phase.It is experimentally shown that the simultaneous removal of both B and P via a single metallurgical refining process is possible by three-layer refining.The metal phase plays an P impurity collector role in the system,but has little effect on B adsorptions.Liquid Fe works better than the molten Cu for P adsorptions.Addition of CaF_(2) to the binary CaO-SiO 2 slag increase significantly the remove rates of B and P,due to CaF_(2) can reduce the viscosity of slag.Increasing temperature from 1600℃to 1700℃improves the B remove rate significantly,but has little effect on P remove.

关 键 词：三相平衡 多晶硅 提纯 热力学模拟 

分 类 号：TK154[动力工程及工程热物理—热能工程]