一种模态局域化感应式MEMS电场传感器设计  

Design of Charge-induced MEMS Electric Field Sensor Based on Mode Localization

作　　者：刘语斐 彭春荣 刘向明 高雅浩 彭思敏 厉嘉程 王俊鹏 毋正伟 任仁 韩炎晖 程千钉 张卫红 LIU Yufei;PENG Chunrong;LIU Xiangming;GAO Yahao;PENG Simin;LI Jiacheng;WANG Junpeng;WU Zhengwei;REN Ren;HAN Yanhui;CHENG Qianding;ZHANG Weihong(State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences;Beijing Orient Institute of Measurement and Test)

机构地区：[1]中国科学院空天信息创新研究院传感技术国家重点实验室 [2]中国科学院大学电子电气与通信工程学院 [3]北京东方计量测试研究所

出　　处：《仪表技术与传感器》2024年第9期22-27,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(62031025);国家重点研发计划项目(2022YFB3207300);北京东方计量测试研究所刘尚合院士专家工作站静电研究基金项目(BOIMTLSHJD20221008)。

摘　　要：文中设计一种基于模态局域化效应的新型电荷感应式MEMS电场传感器,利用弱耦合谐振系统中的模态局域化现象所产生的大振幅比来提高传感器的灵敏度。传感器敏感结构为三自由度弱耦合谐振系统,通过加入屏蔽盖板的方式屏蔽敏感结构上方一侧电场,以未屏蔽端谐振器与屏蔽端谐振器感应电流之比作为输出。通过理论分析与仿真验证,确定了传感器的关键指标,并完成了传感器工艺制作及测试实验。测试结果表明该传感器灵敏度为0.119 m/kV,线性度为5.8%。A new charge-induced electric field sensor based on mode localization was designed in this paper.The sensitivity of the sensor was improved by using the large amplitude ratio caused by mode localization in weakly coupled resonant systems.The sensitive structure of the sensor was a three-degree-of-freedom weakly coupled resonant system.The electric field above the sensitive structure was shielded by adding a shielding plate,and the output was in the form of the induced current ratio between the unshielded resonator and the shielded resonator.Through theoretical analysis and simulation verification,the key indexes of the sensor were determined.The fabrication process of the sensor was achieved and test experiment was conducted.The experimental results show that the sensitivity of the sensor is 0.119 m/kV and the linearity is 5.8%.

关 键 词：MEMS 电场传感器 电荷感应 模态局域化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]