激光干涉诱导向前转移制备银微点及SERS特性研究  

Fabrication of Ag Micro-dots with Laser Interference Induced Forward Transfer Technology and Their SERS Property

作　　者：申惠娟 翁占坤 李昌立[3] 邓锂强 韩太坤 Shen Huijuan;Weng Zhankun;Li Changli;Deng Liqiang;Han Taikun(School of Science,Guangdong University of Petrochemical Technology,Maoming 525000,Guangdong,China;School of Mechatronic Engineering and Automation,Foshan University,Foshan 528225,Guangdong,China;School of Science,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]广东石油化工学院理学院,广东茂名525000 [2]佛山科学技术学院机电工程与自动化学院,广东佛山528225 [3]长春理工大学理学院,吉林长春130022

出　　处：《中国激光》2024年第16期296-304,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金面上项目(62175019);广东省科技计划项目(X220961UZ230);茂名市科技计划项目(2023012);广东石油化工学院校级科研项目(博士启动类)(2023bsqd2009)。

摘　　要：表面增强拉曼散射(SERS)技术在痕量检测等领域中具有重要的作用,制备周期性微纳结构,构建表面等离子体耦合体系,是当前实现高性能SERS基底的主要方法之一。鉴于传统周期性微纳制备技术成本高、效率低等不足,提出了激光干涉诱导向前转移(LIIFT)技术,利用三光束LIIFT制备周期性Ag微点结构,并分析了结构基底的SERS特性。研究结果表明:基于LIIFT技术可以实现Ag微点结构的大面积、高效制备,并且通过调节三光束干涉光场周期,可以实现对Ag纳米颗粒的可控制备。最后,以典型食品添加剂罗丹明B(RhB)为检测对象,验证了Ag微点结构的SERS特性。该研究表明LIIFT技术是一种高效制备SERS芯片的有效途径,在食品、环境及生物工程等领域中具有潜在的应用价值。Objective Surface-enhanced Raman scattering(SERS)plays an important role in trace detection and other fields of research.The use of periodic micro-nano structures has been a popular method for realizing high-performance SERS substrates.Traditional preparation technologies can prepare micro-nano structures with high precision and excellent quality.However,most of them have the limitations of strict environmental requirements,low efficiency,and high material dependence;therefore,it is necessary to develop alternative micro-nano periodic structure preparation techniques.Laser-induced forward transfer(LIFT)has been used to transfer almost all types of materials;however,it is limited in preparing periodic micro-nano structures.Laser interference lithography(LIL)has the advantage of high efficiency in preparing periodic micro–nano structures with large areas.Therefore,combining LIFT with LIL technology,a novel technique of laser interference-induced forward transfer(LIIFT)is proposed to transfer the periodic Ag microdots under three-beam laser interference in this study,which can overcome the shortcomings of traditional technologies and realize large-area metal micro-nano array structure manufacturing in a rapid,low-cost manner.Finally,the SERS properties of the Ag microdots transferred via LIIFT are tested and analyzed.Methods The donor film to be transferred consists of a quartz substrate,a polyimide(PI)sacrificial layer film mixed with carbon nanoparticles(CNPs@PI),and an Ag film.The preparation process of the CNPs@PI thin film is described in Ref.[16],and the Ag film is evaporated onto the CNPs@PI film(Fig.1).The principle of transferring a micro-dot via LIIFT is shown in Fig.2.The azimuth angles(0°,120°,and 240°)and transverse-magnetic(TM)mode of the polarization direction are chosen.Moreover,the effect of the interference period on the transferred microstructure is discussed.Finally,the Raman spectra of RhB on the transferred Ag micro-dots with different periods(9,11,and 15μm)are tested to analyze the SERS

关 键 词：激光技术 激光干涉光刻 激光诱导向前转移 Ag微点结构 表面增强拉曼散射特性 

分 类 号：O437[机械工程—光学工程]