电光聚合物调制器的发展(特邀)  

Development of Electro-Optical Polymer Modulators(Invited)

作　　者：邱枫 Qiu Feng(School and Physics and Optoelectronic Engineering,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,Zhejiang,China)

机构地区：[1]国科大杭州高等研究院物理与光电工程学院,浙江杭州310024

出　　处：《光学学报》2024年第15期47-62,共16页Acta Optica Sinica

基　　金：国家自然科学基金(62075184);浙江省“尖兵领雁+X”研发攻关计划(2024C01112)。

摘　　要：作为电信号到光信号的转换枢纽,高性能电光调制器在高速光互连系统的升级换代以及促进集成光子学发展等方面具有重要的科学意义与广袤的实用前景。电光聚合物调制器在近年来获得了高度关注,其具有调制电压<0.1 V(器件长度为1 cm)、调制带宽>150 GHz、易与硅、SiN、金属等衬底异质集成等优点。本文深入剖析了电光聚合物材料及其调制器的发展历程。首先,综述了电光高分子材料的研究进展,重点介绍了几种代表性的电光聚合物,并探讨了材料结构与性能之间的关系;其次,着重介绍了基于电光聚合物的马赫曾德尔干涉(MZI)型电光调制器和微环调制器,详细分析了其在国内外的研究现状,并对这两类调制器的研究现状进行了总结;最后对材料与器件的商用化进行了展望。Significance The information industry has profoundly affected people’s lives due to advancements in technologies such as 5G,optical computing,the internet,sensing technologies,artificial intelligence,and multimedia/data/signal processing.These innovations have spurred major changes and opportunities within the optoelectronic device industry.One critical challenge is the demand for high-speed communication,which requires the rapid transformation of electronic signals into optical signals.Progress The heart of this transformation lies the development of high-performance electro-optical(EO)modulators.These devices translate electrical signals into the optical realm,which facilitates the transmission of high-bandwidth information while minimizing electrical interference.EO modulators are essential in optical communication systems,where they regulate optical signals.As the demand for faster EO signal conversion grows,the requirements for EO modulators become increasingly stringent.Key criteria include:1)low drive voltage;2)minimal optical loss;3)low energy consumption;4)high bandwidth,among others.EO polymers offer distinct advantages over other materials for modulator fabrication.They can achieve an EO coefficient(r33)exceeding 300 pm/V in neat-film and over 100 pm/V in device.In contrast,commercial lithium niobate,a common modulator material,typically shows lower EO coefficients.The high r33 value of EO polymers indicates their ability to achieve significant modulation with lower voltages,which makes them highly efficient for high-speed applications.Additionally,EO polymers exhibit a low microwave/optical velocity mismatch,which simplifies the design of modulator electrodes for achieving rapid modulation.These characteristics enable EO polymer modulators to operate at frequencies exceeding 100 GHz,ideal for applications requiring rapid data transmission and processing.Moreover,EO polymers can be processed and integrated with various materials and components,including semiconductor light sources,detectors,low-volta

关 键 词：电光聚合物 调制器 光波导 光互连 光电集成 

分 类 号：O472[理学—半导体物理]