铜基微同轴技术及其在毫米波太赫兹领域的应用  

The application of micro-coaxial technology in MMW and THz field

作　　者：史光华[1,2] 郭诚 王真 温潇竹 徐达[2] 张安学 SHI Guanghua;GUO Cheng;WANG Zhen;WEN Xiaozhu;XU Da;ZHANG Anxue(The 13th institute research of CETC,Shijiazhuang 050051,China;Xi’an jiaotong university,Xi’an 7100492,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]西安交通大学,西安7100492

出　　处：《空间电子技术》2024年第5期30-39,共10页Space Electronic Technology

基　　金：国家重点研发计划项目(编号:2022YFF0709200)。

摘　　要：近年来国内铜基微同轴技术在毫米波和太赫兹器件应用领域取得了显著进展。首先,论文综述了铜基微同轴的标准加工工艺,并介绍了基于该工艺成功设计的覆盖DC-1THz频段的多种传输线结构,包括矩形同轴、矩形波导、脊波导等常见射频传输线。其次,基于微同轴技术的大量有源和无源器件的设计,如滤波器、天线、宽带定向耦合器、射频GSG探针、放大器和倍频器等,这些器件的频率范围覆盖10 MHz至330 GHz,均基于微同轴工艺的特点进行了特殊设计,充分利用了该工艺的固有优势。最后,这些成果展示了国内铜基微同轴技术在射频器件模组领域的蓬勃发展,凸显出我国在铜基微同轴射频器件设计和加工技术方面的日益成熟。这些实践应用进一步证明了铜基微同轴技术在微波特性和小型化方面的卓越优势。因此,采用铜基微同轴技术的射频器件在毫米波和太赫兹领域展现出巨大的应用潜力和广阔的发展前景。This paper provides an in-depth exposition of the significant advancements in domestic copper-based microcoaxial technology in the application fields of millimeter-wave and terahertz devices in recent years.Firstly,the standard processing techniques for copper-based microcoaxial structures are reviewed,and a variety of transmission line structures covering the frequency range from DC to 1 THz are introduced,including common RF transmission lines such as rectangular coaxial,rectangular waveguide,and ridge waveguide.Subsequently,the design of a wide range of active and passive devices based on microcoaxial technology is surveyed,including filters,antennas,broadband directional couplers,RF GSG probes,amplifiers,and frequency doublers.These devices operate within a frequency range of 10 MHz to 330 GHz and have been specifically designed to leverage the inherent advantages of the microcoaxial process.Finally,the paper highlights that these achievements demonstrate the vigorous development of domestic copper-based microcoaxial technology in the field of RF device modules,reflecting the increasing maturity of China’s design and fabrication techniques for copper-based microcoaxial RF devices.These practical applications further validate the superior advantages of copper-based microcoaxial technology in terms of micro-wave characteristics and miniaturization.Therefore,RF devices employing copper-based microcoaxial technology show great potential and a broad development prospect in the millimeter-wave and terahertz domains.

关 键 词：铜基微同轴 射频MEMS 毫米波 太赫兹 

分 类 号：V443[航空宇航科学与技术—飞行器设计]