基于专利视角的分子泵技术现状分析  

Analysis of the Current Status of Molecular Pump Technology from a Patent Perspective

作　　者：胡志鹏[1] 田子茹 吕佳梅 HU Zhipeng;TIAN Ziru;LV Jiamei(Patent Examination Cooperation Henan Center of The Patent Office,CNlPA,Zhengzhou 450046,China)

机构地区：[1]国家知识产权局专利局专利审查协作河南中心,郑州450046

出　　处：《高科技与产业化》2024年第9期111-114,共4页High-Technology & Commercialization

摘　　要：受半导体制造、液晶注入等新兴行业的带动,真空技术正日益成为高科技不可缺少的重要环节,作为核心装备之一,分子泵的研制和生产越来越受到重视。本文将以分子泵作为研究对象,通过检索获取与分子泵技术相关的专利数据,结合数据对全球范围内分子泵的专利申请趋势、创新主体、国内外市场以及专利技术等方面进行分析,以期为相关企业在分子泵领域的专利挖掘和专利布局提供借鉴和参考。Driven by emerging industries such as semiconductor manufacturing and liquid crystal injection,vacuum technology is increasingly becoming an indispensable important part of high technology.As one of the core equipment,the development and production of molecular pumps are receiving more and more attention.This article will take molecular pumps as the research object,through the retrieval of patent data related to molecular pump technology,analyze the global patent application trends,innovators,domestic and foreign markets,and patent technology of molecular pumps,in order to provide reference for related enterprises in the field of molecular pumps patent mining and patent layout.

关 键 词：分子泵 专利分析 技术现状 专利布局 

分 类 号：G255.53[文化科学—图书馆学]