双端面无研合量块干涉测量的研究进展  

Review on development of double-end interferometer for measurement of gauge block without wringing

作　　者：张宝武[1] 张旭东[2] 欧阳烨锋 ZHANG Baowu;ZHANG Xudong;OUYANG Yefeng(College of Metrology Measurement and Instrument,China Jiliang University,Hangzhou 310018,China;National Institute of Metrology,Beijing 100013,China)

机构地区：[1]中国计量大学计量测试与仪器学院,浙江杭州310018 [2]中国计量科学研究院,北京100013

出　　处：《中国计量大学学报》2024年第3期374-383,共10页Journal of China University of Metrology

基　　金：国家市场监督管理总局科技计划项目(No.2022MK220);国家重点研发计划项目(No.2023YFF0616203)。

摘　　要：目的:量块是一种端面长度标准,处于长度量值传递与溯源的关键位置。由于研合层的存在,现行单端面研合式量块干涉仪测量精度的提高受到了限制。为此,量块测量的技术革新开始向着双端面无研合方式迈进。为了跟踪这种新技术的研究动态,分类汇总介绍了其最新的进展。方法:首先介绍了单端面研合式测量方案,阐述了其中的主要问题,然后按照移相法、小数重合法和低相干光源干涉法等三大类综述了双端面无研合测量方案,简述了每种测量方案的实验系统和量块长度解算理论。结果:相比于单端面研合方式,双端面无研合的量块测量技术能够剔除研合层厚度,减少量块磨损,提高量块测量精度,在自动化方面具有突出的优势,但是需要深入研究相位跃变、测量面形貌、干涉光路非同轴,以及干涉光路与量块测量面的非垂直性引起的测量误差。结论:综述结果显示,双端面无研合的量块干涉测量技术已经成为量块测量领域的研究热点,它的成功将极大提升量块计量水平,提高相关领域的测量精度。Aims:The gauge block is an end surface length standard,which locates the key position in the value transfer and traceability.Due to the wringing,the accuracy improvement of the current single-end interferometer with wringing is limited.For this reason,technological innovation for measurement of gauge block is moving towards the method of double-end interferometer without wringing.To better track this new technological approach,the latest progress classified is introduced.Methods:firstly,scheme of the current single-end interferometer with wringing is stated and the main problems are analyzed.Then the schemes of double-end interferometer without wringing are reviewed according to phase stepping,exact fractions method and low-coherence light interferometer.The experimental system and the principle to calculate the length of gauge block of each measurement scheme are briefly described.Results:Compared with the single-end interferometer with wringing,double-end interferometer without wringing has high accuracy because of elimination of the wringing and reducing wear,and it has potential for automation.However,aspects to result in measurement error,e.g.phase transition,measurement surface topography,interference optical path being not coaxial,and nonperpendicular between the interference optical path and surface of gauge block,should be studied deeply.Conclusions:The review indicates that such interferometry technology to measure gauge block has become the hotspot.Its success will greatly improve the measurement level and accuracy in related fields.

关 键 词：计量学 量块 干涉仪 无研合 双端面 

分 类 号：TB921[一般工业技术—计量学]