基于激光干涉的多轴运动平台垂直度测量  

Perpendicularity measurement of multi-axis motion platform based on laser interferometry

作　　者：罗凯元 郑文炜 杨霖 LUO Kaiyuan;ZHENG Wenwei;YANG Lin(Calibration and Testing Center,the Fifth Electronic Research Institute of MIIT,Guangzhou 511370,China)

机构地区：[1]工业和信息化电子第五研究所计量检测中心,广东广州511370

出　　处：《光学精密工程》2024年第17期2654-2662,共9页Optics and Precision Engineering

基　　金：国家重点研发计划项目(No.2022YFF0606000)。

摘　　要：测量垂直度误差的常用方法有实物量具法、体积测量法、CCD测量法、平面光栅测量法、激光跟踪仪测量法和激光干涉仪测量法等,这几种方法普遍存在操作不简便,使用成本高或无法实现在线测量等缺点。为此,提出了一种基于激光干涉仪原理的多轴运动平台垂直度在线测量方法,利用激光器、五角分光棱镜、五角棱镜、直线度干涉镜、直线度反射镜等组件构建了一种多轴激光干涉垂直度测量装置。通过光路设计,可以将此装置搭建于被测多轴运动平台上,从而实现高效率、高精度的垂直度在线测量。最后通过与花岗石角尺测量垂直度的方法进行精度比对测试。测试结果表明,偏差为1.4″,归一化偏差E_(n)<1,结果较理想,证明了方案的可行性。Perpendicularity error is a critical geometric error in multi-axis motion platforms,indicating the vertical deviation of machine tool components during movement.This deviation significantly affects spatial positioning errors,particularly as the stroke length of the moving axis increases.Various methods exist for measuring perpendicularity error,including physical gauges,volumetric measurements,CCD measure⁃ments,planar gratings,laser trackers,and laser interferometry.However,these methods often suffer from drawbacks such as operational inconvenience,high costs,or inability to perform online measure⁃ments.This paper presents a multi-axis laser interferometric device for measuring perpendicularity,utiliz⁃ing components like laser emitters,pentagonal beam splitters,prisms,straightness interferometers,and reflectors.With a well-designed optical path,this device can be integrated into the multi-axis motion plat⁃form,enabling efficient and precise online measurement of perpendicularity.A comparison test against a granite protractor showed a deviation of 1.4″and a normalized deviation E_(n)<1,confirming the method's feasibility and accuracy.

关 键 词：计量学 激光干涉仪 垂直度 多轴 

分 类 号：TB921[一般工业技术—计量学]