3D打印镍基合金GH3536化学机械抛光机理研究  

Mechanism of Chemical Mechanical Polishing of 3D Printed Nickel-based Alloy GH3536

作　　者：杭伟[1] 王应刚 韦岚清 韩云晓 马毅 陈泓谕 HANG Wei;WANG Yinggang;WEI Lanqing;HAN Yunxiao;MA Yi;CHEN Hongyu(Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of Ministry of Education,Zhejiang University of Technology,Hangzhou 310014,China;Research Center of Advanced Lightweight and High-performance Materials,Nanjing University of Technology,Nanjing 210009,China)

机构地区：[1]浙江工业大学特种装备制造与先进加工技术教育部重点试验室,杭州310014 [2]南京工业大学先进轻质高性能材料研究中心,南京210009

出　　处：《表面技术》2024年第20期143-157,共15页Surface Technology

基　　金：国家重点研发计划(2023YFE0202900);国家自然科学基金(52375468,52275467,52305515);浙江省省自然科学基金(LZY23E050004,LY21E050011);湖州市重点研发“揭榜挂帅”项目(2017M621966)。

摘　　要：目的实现无瑕疵的3D打印镍基合金GH3536超光滑镜面,揭示镍基合金GH3536在不同成分溶液下的化学机械抛光(Chemical Mechanical Polishing,CMP)去除机理。方法采用单因素实验法通过CMP对镍基合金GH3536展开研究。采用电化学测试技术和X射线光电子能谱(X-rayPhotoelectron Spectroscopy,XPS)分析3D打印镍基合金GH3536在不同p H值、不同氧化剂浓度和不同抛光液类型下的溶解与钝化行为。结果当pH值为3~3.5、H_(2)O_(2)质量分数为10%时,可获得最优的材料去除率(MRR为20.24 nm/min)和表面粗糙度(Surface Roughness,其中Ra为0.684 nm,S_(a)为1.699 nm),CMP抛光面可达到超光滑低损伤的镜面效果。根据电化学和XPS测量结果,建立了化学反应方程,确定了去除机理,具体为:在化学机械抛光过程中,镍基合金GH3536表面首先被H_(2)O_(2)氧化成Ni、Fe等氧化物;其次,在酸性H^(+)作用下,氧化物转化为Ni^(2+)、Ni^(3+)和Fe^(3+)等多价离子;最后,多价离子会与柠檬酸发生络合反应生成较软的柠檬酸盐络合物,在CMP抛光中发生去除。结论与传统电化学加工相比,采用CMP加工的3D打印镍基合金GH3536的表面粗糙度更低,表面形貌更好,可用于对面型精度要求较高的镍基合金的超精密加工。基于电化学测试技术和XPS深度剖析的方法有效揭示了镍基合金GH3536的材料去除机理,获得了不同p H值、氧化剂浓度和不同抛光液种类对材料去除机理的影响规律。为获得新型高质量表面的3D打印合金材料提供指导意义。Nickel-based superalloy GH3536 is a preferred material in the aerospace industry due to its high corrosion resistance,oxidation resistance,high-temperature resistance,and excellent processability.However,its surface polishing still remains a serious challenge.Traditional techniques such as electrochemical polishing are unable to achieve non-damage mirror processing,and the used electrolyte pollutes the environment.This study aims to investigate the removal mechanism of chemical-mechanical polishing(CMP)for GH3536 nickel-based alloy in different composition solutions to obtain a flawless 3D-printed ultra-smooth mirror.The CMP was studied by a single-factor test.Electrochemical test technology and X-ray photoelectron spectroscopy were applied to find out the rate of reaction and the valence state of the surface in the CMP process.This helped to figure out the specific corrosion process and complexation reaction.It found out how fast the passivation film formed and how quickly it was removed from the alloy's surface by looking at how the corrosion potential and current changed over time in the polishing liquid.The ways the chemical makeup of the polishing liquid affected the surface of the material were also found.The elemental composition and electronic state of the surface of the 3D-printed nickel-based alloy GH3536 were measured.The surface morphology of the nickel-based alloy was observed by an ultra-depth microscope and a Zeiss field emission scanning electron microscope.The Material Removal Rate(MRR)of the alloy was calculated by precision balance,and the roughness change of the alloy was measured by an optical 3D surface profiler.The material removal rate and surface roughness were used to characterize nickel-based alloys.The material removal rate of GH3536 decreased with the increase of PH value and increased with the increase of oxidant concentration during CMP processing.Surface roughness decreased first and then increased with the increase in PH value and oxidizer concentration.The results showed that whe

关 键 词：增材制造 镍基合金GH3536 化学机械抛光 表面粗糙度 加工机理 

分 类 号：TG132.3[一般工业技术—材料科学与工程] TG175[金属学及工艺—合金] TP391.73[金属学及工艺—金属学]