MEMS集成爆炸箔芯片的发火性能研究  

Research on the Firing Performance of MEMS Integrated Exploding Foil Chip

作　　者：杨智 王一飞 黎浩学 韩书锋 王玉强 朱朋[2] YANG Zhi;WANG Yi-fei;LI Hao-xue;HAN Shu-feng;WANG Yu-qiang;ZHU Peng(Xi’an Aerospace Propulsion Technique Institute,Xi’an,710025;School of Chemistry and Chemical Engineering,Nanjing University of Science and Technology,Nanjing,210094)

机构地区：[1]西安航天动力技术研究所,陕西西安710025 [2]南京理工大学化学与化工学院,江苏南京210094

出　　处：《火工品》2024年第5期71-77,共7页Initiators & Pyrotechnics

摘　　要：为了实现高速飞片输出和爆炸箔起爆器(Exploding Foil Initiator, EFI)低能发火,依据EFI工作原理,进行Cu桥箔电热仿真、PC(聚氯代对二甲苯)飞片冲击作用参数计算和SU-8加速膛结构确定。基于结构设计参数,采用微机电系统(Micro-Electro-Mechanical System, MEMS)工艺实现了爆炸箔芯片一体化批量制备,并开展了MEMS集成爆炸箔芯片的桥箔电爆特性、飞片实时速度和冲击起爆性能测试。结果表明:基于小尺寸桥箔结构在较低放电电压下就能够获得较高的飞片速度,并且在加速膛口飞片速度达到峰值速度的96%以上;冲击起爆HNS-IV药柱的最低发火条件为0.22μF/1 100 V,实现了EFI低能发火。In order to achieve high-velocity flyer output and low energy ignition of the exploding foil initiator(EFI),the study on electro-thermal simulation of Cu bridge foil,impact parameters calculation of PC flyer,and dimensions determination of SU-8 barrel were conducted according to the working principle of EFI.The prototype exploding foil chip has been batch-prepared using micro-electro-mechanical system(MEMS)technology based on the structure design parameters.Furthermore,the primary characteristics of MEMS exploding foil chip were tested,including the foil electrical-explosion properties,real-time flyer velocities and impact initiation properties.The results show that based on a small-sized bridge foil structure,higher flyer velocity can be achieved at lower discharge voltage,and the flyer velocity at the SU-8 barrel muzzle reaches over 96%of its peak velocity;The minimum ignition condition for impact initiation of HNS-IV charges is 0.22μF/1100 V,which indicates EFI with low energy ignition has been achieved.

关 键 词：集成爆炸箔芯片 MEMS工艺 飞片实时速度 低能发火 

分 类 号：TJ450.3[兵器科学与技术—火炮、自动武器与弹药工程]