调制周期对磁控溅射Cr/类石墨碳多层膜腐蚀-磨损性能的影响  

Influence of Modulation Periodicity on Tribo-corrosion Properties of Magnetron-sputtered Film Consisting of Multiple Alternating Layers of Cr and Graphite-like Carbon

作　　者：李迎春[1,2] 杨更生 杨明宣 邱明[1,2] 范恒华 LI Yingchun;YANG Gengsheng;YANG Mingxuan;QIU Ming;FAN Henghua(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471000,Henan,China;Collaborative Innovation Center of Machinery Equipment Advanced Manufacturing of Henan Province,Henan University of Science and Technology,Luoyang 471000,Henan,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471000 [2]河南科技大学机械装备先进制造河南省协同创新中心,河南洛阳471000

出　　处：《材料导报》2024年第21期212-218,共7页Materials Reports

基　　金：国家自然科学基金(52275186);河南省外专局引智项目(HNGD2020003)。

摘　　要：海洋环境用关键运动部件在使用时承受腐蚀与磨损的交互作用,在其表面涂覆耐腐蚀-磨损防护涂层是提高其服役寿命的有效手段之一。本工作采用直流磁控溅射沉积技术在15-5PH不锈钢试样上制备调制周期为940 nm、375 nm和234 nm的Cr/GLC多层膜(分别标记为S1、S2和S3),并通过微观形貌分析、电化学试验、腐蚀-磨损试验分析了调制周期对Cr/GLC多层膜的结构、电化学性能及耐腐蚀-磨损性能的影响。研究结果表明:随着调制周期的缩短,薄膜柱状生长趋势逐渐减弱,膜层更加致密,同时sp^(2)键相对含量逐渐增大,石墨化程度加剧,力学性能更优。在人工海水介质中,随着调制周期的缩短,薄膜层间界面增多,抑制了裂纹的扩展和腐蚀通道的形成,阻碍了腐蚀介质的渗透,多层膜S3的耐腐蚀性能最优。在腐蚀-磨损过程中,由于载荷和腐蚀介质的共同作用,具有致密结构、适宜调制周期的S2薄膜的磨损率仅为2.50×10^(-16)m^(3)/(N·m),表现出最优的耐腐蚀-磨损性能。因此,设计合适的调制周期是提高Cr/GLC多层膜耐腐蚀-磨损性能的关键。Critical moving parts used in marine environment suffer the interactive impact by corrosion and wear,and depositing tribo-corrosion-resistant coatings on these metal components is one of the effective means to improve their service life.This work,using DC magnetron sputtering technique,prepared on surfaces of 15-5PH stainless steel substrates three samples of films,which were consisted of multiple alternating layers of Cr and graphite-like carbon(GLC),and differed in modulation periodicities(940 nm,375 nm and 234 nm,marked as S1,S2 and S3,respectively).Further,it carried out morphological observation,electrochemical test,and tribo-corrosion test to clarify the effects of modulation periodicity on the films structures,electrochemical properties,and tribo-corrosion resistances.The experiments found,with the decrease of modulation periodicity,a gradually decreasing tendency of columnar crystal growth,and consequently,gradual increases in film density and sp^(2)bond content,resulting in intensified graphitization and higher mechanical strength.In artificial seawater,multi-layer films with smaller modulation periodicities had more interlayer interfaces,which facilitated inhibition of crack expansion and corrosion channels formation and hindered the penetration of corrosive medium.And the test indicated the best corrosion resistance acquired by S3 film.In the tribo-corrosion test,due to the interaction of load and corrosive medium,the S2 film with denser structure and suitable modulation periodicity achieved a wear rate of only 2.50×10^(-16)m ^(3)/(N·m),exhibiting optimal tribo-corrosion resistance.It could be concluded that the adjustment of modulation periodicity is of key importance to improving the tribo-corrosion resistance of Cr/GLC multi-layer films.

关 键 词：磁控溅射 Cr/类石墨碳(GLC)多层膜 调制周期 腐蚀-磨损 

分 类 号：TH117.1[机械工程—机械设计及理论]