应用于标准电容装置的高精度温控系统设计  

Design of high⁃precision temperature control system for standard capacitor device

作　　者：曾胥 刘泽[1] 李俊杰 曹景铭 万泽文 贺晓霞[2] ZENG Xu;LIU Ze;LI Junjie;CAO Jingming;WAN Zewen;HE Xiaoxia(School of Electronic and Information Engineering,Beijing Jiaotong University,Beijing 100044,China;Department of Precision Instrument,Tsinghua University,Beijing 100084,China)

机构地区：[1]北京交通大学电子信息工程学院,北京100044 [2]清华大学精密仪器系,北京100084

出　　处：《传感器与微系统》2024年第11期99-102,共4页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(2020YFC2200704)。

摘　　要：在引力波探测的相关技术任务中,需要研究设计标准电容装置用于电容位移传感电路的标定测试。为了保证标准电容装置的高精度和高稳定性,设计了配套的大体积高精度温控系统。该系统由保温腔体、温控主机、上位机3个部分组成。温控主机是整套控制系统的核心,包含主控电路板、高精度线性电源、有机发光二极管(OLED)显示屏、通信接口、用户界面(UI)等,系统使用模糊PID控制算法进行温度控制。实验结果表明,温控系统的短期温度控制稳定性(24 h)能够达到±0.002℃。使用该系统给标准电容装置提供环境保障,能够实现10 h下2 aF(10-21 F)的短期稳定性。In the relevant technical tasks of gravitational wave detection,it is necessary to study and design a standard capacitor device for the calibration test of the capacitive displacement sensor circuit.In order to ensure the high precision and high stability of the standard capacitor device,a matching large⁃volume high⁃precision temperature control system is designed.The system consists of three parts including an insulation chamber,a temperature controller,and host computer.The temperature controller is the core of the whole control system,including main control circuit board,high⁃precision linear power supply,organic light emitting diode(OLED)display,communication interface,UI,etc.The whole system uses fuzzy PID control algorithm for temperature control.The experimental results show that the short⁃term temperature control stability(24 h)of the temperature control system can reach±0.002℃.Using this system to provide environmental guarantee for standard capacitor devices can achieve short⁃term stability of 2 aF(10-21 F)during 10 h.

关 键 词：电容稳定性 控温箱 模糊PID控制 控温精度 控制系统设计 引力波探测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP273[自动化与计算机技术—控制科学与工程]