Ti掺杂非晶碳复合光热转换薄膜的制备及性能研究  

Preparation and Performance Study of Ti-doped Amorphous Carbon Composite Photothermal Conversion Films

作　　者：令晓明[1,2] 陈欣仪 王伟奇 王曼 LING Xiaoming;CHEN Xinyi;WANG Weiqi;WANG Man(National Engineering Research Center for Technology and Equipment of Environmental Deposition,Lanzhou Jiaotong University,Lanzhou 730070,China;Key Laboratory of Opto-electronic Technology and Intelligent Control of Ministry of Education,Lanzhou Jiaotong University,Lanzhou 730070,China)

机构地区：[1]兰州交通大学国家绿色镀膜技术与装备工程技术研究中心,兰州730070 [2]兰州交通大学光电技术与智能控制教育部重点实验室,兰州730070

出　　处：《真空与低温》2024年第6期629-633,共5页Vacuum and Cryogenics

基　　金：甘肃省自然科学基金(22JR5RA332)。

摘　　要：光热转换薄膜是太阳能光热利用的核心部件,直接影响光热转换效率。采用反应磁控溅射技术,使用Ti靶和石墨靶制备了Ti/a-C:H/Ti(H)/a-C:H/Ti(L)/a-C:H复合光热转换薄膜,研究讨论了薄膜的形貌特征和结构组成,并对其光吸收特性进行了分析。结果显示:复合薄膜具有显著的光谱选择性特性,其中Ti和C以TiC形式存在于吸收层中;薄膜较高的表面粗糙度有助于增强光的吸收能力;复合薄膜的吸收率为0.91,发射率为0.13,具有优异的光学性能。The photothermal conversion film is the core component of solar photothermal utilization and directly affects the conversion efficiency of the entire system.A Ti/a-C:H/Ti(H)/a-C:H/Ti(L)/a-C:H composite photothermal conversion film was prepared by reactive magnetron sputtering using Ti and graphite targets.The morphology characteristics and structural composition of the film were studied and discussed,and its optical absorption properties were analyzed.The results show that the composite film has significant spectral selectivity,with Ti and C existing in the absorption layer in the form of TiC.Meanwhile,the high surface roughness of the film helps enhance its light absorption ability,with an absorption rate of 0.91 and an emissivity of 0.13,demonstrating excellent optical performance.

关 键 词：光热转换薄膜 反应磁控溅射 非晶碳薄膜 光学性能 

分 类 号：TB79[一般工业技术—真空技术] O484.41[理学—固体物理]