一种基于压电驱动的扭转式MEMS电场传感器设计与仿真优化  

Design and Simulation Optimization of a Torsional MEMS Electric Field Sensor Based on Piezoelectric Drive

作　　者：刘阳 饶宇飞 李海峰 王誉铮 魏诗超 马斌 杨庆[3] 柯锟 廖伟 LIU Yang;RAO Yu-fei;LI Hai-feng;WANG Yu-zheng;WEI Shi-chao;MA Bin;YANG Qing;KE Kun;LIAO Wei(State Grid Henan Electric Power Research Institute,Zhengzhou 450000,China;Henan Nuodun Technology Co.,Ltd.,Zhengzhou 450000,China;State Key Laboratory of Power Transmission Equipment Technology,School of Electrical Engineering,Chongqing University,Chongqing 400044,China)

机构地区：[1]国网河南省电力公司电力科学研究院,郑州450000 [2]河南诺盾科技有限公司,郑州450000 [3]重庆大学电气工程学院输变电装备技术全国重点实验室,重庆400044

出　　处：《科学技术与工程》2024年第28期12211-12219,共9页Science Technology and Engineering

基　　金：国家自然科学基金面上项目(52077019)。

摘　　要：电力传感技术是实现新型电力系统数字化转型的关键,其中电场参量是重要的监测对象之一。提出一种基于压电驱动的扭转式微机电系统(micro-electro-mechanical system,MEMS)电场传感器。该微机电系统电场传感器的通过驱动结构带动屏蔽电极在感应电极表面周期性振动实现电场的调制测量。其压电驱动结构为4个对称分布的L型压电悬臂梁,屏蔽电极和感应电极为两对交错耦合的梳齿电极构成。接着通过COMSOL仿真软件建立了结构的固体力学-静电耦合模型,计算了敏感结构的谐振频率和振动幅值。结果显示:结构的工作模态下的谐振频率可达到25047 Hz,在3 V的交流驱动电压下屏蔽电极末端位移为85.06μm。进一步通过参数扫描方式对敏感结构的关键参数进行仿真分析。优化了梳齿电极的长度、宽度、间距、个数等参数以及感应电极长度、感应电极宽度、梳齿电极的个数和感应电极间距。最后完成了传感器的测试。测试结果表明:该传感器的灵敏度为3.24 mV/(kV/m),测量误差最大仅为3.75%。Power sensing technology is the key to realizing the digital transformation of the new power system,where the electric field parameter is one of the important monitoring objects.A torsional micro-electro-mechanical system(MEMS)electric field sensor based on piezoelectric drive was proposed.The MEMS electric field sensor was driven by a drive structure to realize the modulation measurement of electric field by periodically vibrating the shielding electrode on the surface of the sensing electrode.The piezoelectric drive structure consisted of four symmetrically distributed L-type piezoelectric cantilever beams,and two pairs of staggered-coupled comb electrodes at the shielding electrode and the sensing electrode.Then the solid mechanics-electrostatic coupling model of the structure was established by COMSOL simulation software,and the resonance frequency and vibration amplitude of the sensitive structure were calculated.The results show that the resonance frequency of the structure can reach 25047 Hz in the operating mode,and the end displacement of the shielding electrodes is 85.06μm under an AC driving voltage of 3 V.Furthermore,the key parameters of the sensitive structure were simulated and analyzed by parameter scanning.The parameters such as the length,width,spacing and number of comb electrodes as well as the length of the induction electrode,the width of the induction electrode,the number of comb electrodes and the spacing of the induction electrodes were optimized.Finally,the testing of the sensor was completed.The test results show that the sensitivity of the sensor is 3.24 mV/(kV/m)with a maximum measurement error of only 3.75%.

关 键 词：微机电系统(MEMS) 电场传感器 压电驱动 COMSOL 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]