夹层式WO_(3)-NiO电致变色玻璃:从材料到器件的体系化研究  

Laminated WO_(3)-NiO Electrochromic Glass:From Starting Material to Device Assembling

作　　者：杨晔 谢紫凌 程奕 户其钊 金琼雅 袁晨 YANG Ye;XIE Ziling;CHENG Yi;HU Qizhao;JIN Qiongya;YUAN Chen(Laboratory of Optoelectronic and Information Materials and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China;University of Chinese Academy of Sciences,College of Materials Science and Opto-electronic Technology,Beijing 100049,China;SenXiang(NingBo)New Material Co.,Ltd.,Ningbo 315171,China)

机构地区：[1]中国科学院宁波材料技术与工程研究所光电信息材料与器件实验室,宁波315201 [2]中国科学院大学材料科学与光电技术学院,北京100049 [3]森祥(宁波)新材料有限公司,宁波315171

出　　处：《中国表面工程》2024年第4期117-133,共17页China Surface Engineering

基　　金：国家重点研发计划(2023YFC3011602);宁波市北仑区关键核心技术攻关(2023BLG007)。

摘　　要：基于WO_(3)-NiO体系的电致变色(EC)玻璃具有优异的可见与红外的主动调控特性和节能效果,在建筑、新能源汽车等产业的应用得到越来越多的关注。生产效率与制造成本等因素的限制,使得大面积WO_(3)-NiO电致变色玻璃未规模化地投入市场。相比于在单一玻璃表面采用膜层堆栈方式制备多层膜结构的电致变色器件,以高性能锂离子胶膜为中间层,将磁控溅射沉积的Glass/TCO/WO_(3)以及Glass/TCO/NiO通过层压的方式组装成夹层式器件是一种可行地实现电致变色玻璃大面积、低成本规模化生产的技术手段,正逐渐成为器件制备技术的主流。然而,面向于大面积夹层式WO_(3)-NiO电致变色玻璃的低成本制造和新的应用需求,仍有必要开展从材料到器件的体系化研究。在材料端,开发兼容现有镀膜产线的高质量EC氧化物陶瓷靶材制备技术,高性能WO、NiO薄膜成分、结构、性能与色彩的调控技术,具备高离子电导率、高粘结强度、高热稳定、高透明且易于实现大面积规模化生产的锂离子胶膜材料及其制备技术等。在器件端,开发与现有玻璃产业兼容的大尺寸器件的层压工艺,弧型器件的制备技术,具备更高效节能且能呈现中性着褪色的器件技术等。针对上述挑战,综述了国内外相关研究团队在上述领域的研究进展,结果表明,可以制备出满足高性能电致变色薄膜沉积的EC氧化物陶瓷靶材,通过调节磁控溅射工艺参数可以有效实现对薄膜成份、结构以及性能调控,开发出满足层压工艺的、具有高离子电导率(1.51×10^(-4)S·cm^(-1))的固态聚合物电解质,最终利用商用高压釜实现30 cm×30 cm WO_(3)-NiO电致变色器件高质量制备。WO_(3)-NiO-based electrochromic devices(ECDs),which can actively regulate visible and infrared(IR)light and offer outstanding energy-efficient performance,have been extensively investigated owing to their potential application in smart windows for energy-efficient buildings and light-modulated skylight glass for electric vehicles.However,the high cost and low production efficiency of ECDs severely restrict their large-scale application.Compared with the conventional ECD fabrication process,which involves stacking multiple films on a single glass substrate,the lamination process for assembling a WO_(3)–NiO ECD by laminating the individual components of glass/TCO/WO_(3)and glass/TCO/NiO with a transparent adhesive electrolyte interlayer is gradually becoming mainstream for realizing low-cost,commercially viable,large-area ECDs.However,for the practical production and new application of large-area laminated devices,one must perform a systematic survey from the starting material to device assembly,including high-quality EC oxide targets for large-area sputtering deposition;sputtered EC films with a regulated composition,microstructure,high performance,and color;achieve large transparent adhesive electrolyte foils with high room-temperature ionic conductivity,temperature stability,and high adhesive strength;perform a large-area ECD lamination process in the existing commercialized facilities;realize curved-device fabrication;and achieve an energy-efficient device with neutral color in both tinted and bleached states.Hence,researchers have conducted a series of studies,and the progress is presented in this review.First,the requirements and preparation methods of WO_(3)and NiO ceramic targets for large-scale production are presented.An appropriate level of electrical conductivity is required to satisfy middle-frequency sputtering,which is the most commonly used sputtering mode in commercialized films.The EC performance and W/O stoichiometric ratio of a WO_(3)film sputtered using a ceramic target can be effectively adj

关 键 词：电致变色器件 玻璃 靶材 磁控溅射 薄膜 

分 类 号：TU524[建筑科学—建筑技术科学] TE08[石油与天然气工程] O439[机械工程—光学工程]