新国际单位制体系下芯片化计量的研究进展与发展趋势  

The Research Advancements and Trends in Chip-integrated Metrology within the Framework of the New International System of Units(SI)

作　　者：郭林宝 赵昭[1] 李道政 李亚杰 沙长涛[1] 张红[1] GUO Linbao;ZHAO Zhao;LI Daozheng;LI Yajie;SHA Changtao;ZHANG Hong(Chinese Electronics Standardization Institute,Beijing 100007,China)

机构地区：[1]中国电子技术标准化研究院,北京100007

出　　处：《宇航计测技术》2024年第5期8-15,共8页Journal of Astronautic Metrology and Measurement

摘　　要：芯片化计量是一种实现途径,具有高效、低成本的优势。国际单位制(SI)的巨大变革使计量工作摆脱了实物基准的困扰,使复现量值的方法更加灵活。伴随量子测量方法的发展,诞生了一些芯片级计量标准装置。微机电(Micro-Electro-Mechanical System,MEMS)、微流控和微型激光器等是芯片化计量发展过程中的关键支撑技术。基于量子测量技术,国际单位制中部分基本单位的实现,如时间、长度、温度和电流,已具备芯片化的雏形。整体上,芯片化计量仍处于起步阶段,主要表现为传感元件的芯片化。未来可通过不断丰富芯片级计量基(标)准仪器的种类,逐步构建和完善芯片化的溯源链,来推动芯片化计量的发展。Chip-integrated metrology serves as an implementation method,possessing the advantages of high efficiency and low cost.The significant revolution of the International System of Units(SI)has freed metrological work from the trouble of physical benchmark and made the methods of reproducing values more flexible.Along with the development of quantum measurement methods,a number of chip-scale metrological standard device have been born.Micro-Electro-Mechanical System(MEMS),microfluidics,and chip-integrated laser are key supporting technologies for chip-integrated metrology.Based on quantum measurement technology,the realization of some fundamental units in the SI,like time,length,temperature,and current,has already taken the shape of chipization.Overall,chip-integrated metrology is still in its infancy,mainly in the form of chip-based sensing elements.In the future,continuous efforts should be made to develop chip-integrated metrological standards instruments and gradually construct a chip-integrated traceability chain to fulfill chip-integrated metrology.

关 键 词：计量 微机电系统 微流控 国际单位制 量子计量 半导体激光器 光纤激光器 

分 类 号：TB99[一般工业技术—计量学] V1[机械工程—测试计量技术及仪器]