石英单晶微机械陀螺仪研究进展  

Research Progress of Quartz Single Crystal Micromachined Gyroscopes

作　　者：孙卓 孙立涛 窦广彬 Sun Zhuo;Sun Litao;Dou Guangbin(Education Ministry Key Laboratory of MEMS,School of Integrated Circuits,Southeast University,Nanjing 211100,China)

机构地区：[1]东南大学集成电路学院MEMS教育部重点实验室,南京211100

出　　处：《微纳电子技术》2024年第11期17-30,共14页Micronanoelectronic Technology

基　　金：国家重点研发计划(2023YFB3208901)。

摘　　要：对Z切、ST切、AT切三种切割方式的石英单晶微机械陀螺仪的基本工作原理进行了阐述,梳理了不同类型陀螺仪的发展历程,重点介绍了三种石英单晶微机械陀螺仪的设计结构、性能特点及其应用场景,并从灵敏度、动态范围、稳定性、抗冲击性及工作频率等方面对三种类型石英微机械陀螺仪各自的性能优势与面临的技术挑战进行了评述,总结了当前国内外在石英单晶微机械陀螺仪研究领域的主要进展和创新点。最后,针对不同切割方式的石英单晶微机械陀螺仪的结构及工作特点,分析了其各自的优点与不足,进行了总结和对比,讨论了石英微机械陀螺仪的未来发展方向。The fundamental operating principles of three cutting methods of quartz single crystal micromachined gyroscopes(Z-cut,ST-cut and AT-cut)are elucidated.The developmental history of different types of gyroscopes is reviewed,focusing on the design structures,performance characteristics and application scenarios of the three types quartz single crystal micromachined gyroscopes.A critical evaluation of their performance advantages and technical challenges are presented in terms of sensitivity,dynamic range,stability,shock resistance and operational frequency.Major advancements and innovations in the field of quartz single crystal micromachined gyroscopes at home and abroad are summarized.Finally,according to the structures and operational characteristics of quartz single crystal gyroscopes with different cutting methods,their advantages and disadvantages are analyzed,summarized and compared,and the future development directions of quartz micromachined gyroscopes are discussed.

关 键 词：石英 微机械陀螺仪 压电效应 Z切音叉微机械陀螺仪 ST切表面声波微机械陀螺仪 AT切厚度剪切振动陀螺仪 微电子机械系统(MEMS) 

分 类 号：TH703[机械工程—仪器科学与技术] V241.5[机械工程—精密仪器及机械]