基于反射率修正的柱透镜面形光谱共焦测量研究  

Research on Spectral Confocal Measurement of Cylindrical Lens Surface Shape Based on Reflectivity Correction

作　　者：李春艳 刘畅 刘继红 李丹琳 蒋杰伟 Li Chunyan;Liu Chang;Liu Jihong;Li Danlin;Jiang Jiewei(Institute of Electronic Engineering,Xi’an University of Posts&Telecommunication,Xi’an 710121,Shaanxi,China)

机构地区：[1]西安邮电大学电子工程学院,陕西西安710121

出　　处：《激光与光电子学进展》2024年第17期171-178,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62276210);陕西省自然科学基金资助项目(2022JM-387);陕西省重点研发计划资助项目(2020GY-127);西安邮电大学创新创业基金(CXJJYL2022024)。

摘　　要：为实现柱透镜面形的精确测量,研究了反射率引起的面形测量误差。首先介绍了光谱共焦位移传感系统的工作原理,并在空间坐标系下利用柱透镜的结构参数,推导了系统的光谱响应,建立了柱透镜面形测量模型。然后,对由各点反射率引起的光谱曲线谱峰漂移,以及这种漂移导致的面形测量误差进行了理论研究和仿真分析。。为修正透镜曲面反射率对测量结果的影响,采用S-G滤波及高斯拟合实现滤波和光谱信号峰值波长的提取,建立了反射率误差修正算法,最后通过搭建实验平台,完成了基于反射率修正的柱透镜面形测量。实验结果表明:修正前面形测量结果的平均绝对误差和均方根误差分别为9.18μm和9.79μm;修正后面形平均绝对误差和均方根误差分别为0.71μm和0.75μm,面形测量精度有了很大提高,验证了理论分析的正确性及所提反射率修正算法的有效性。To achieve accurate measurement of the surface shape of a cylindrical lens,research has been conducted on the measurement errors caused by reflectance.The working principle of the spectral confocal displacement sensing system is first introduced,and the spectral response of the system is derived in the spatial coordinate system using the structural parameters of the cylindrical lens.Then,theoretical research and simulation analysis are conducted on the spectral peak drift caused by the reflectance at each point and the resulting measurement errors in the surface shape.To correct the influence of lens surface reflectance on the measurement results,an error correction algorithm is proposed using S-G filtering and Gaussian fitting to achieve filtering and extraction of the peak wavelength of the spectral signal.Finally,by building an experimental platform,the measurement of the cylindrical lens surface shape based on reflectance correction is completed.The experimental results show that the mean absolute error and root mean square error of the measurement results before correction are 9.18μm and 9.79μm,respectively.After correction,the mean absolute error and root mean square error of the surface shape are 0.71μm and 0.75μm,respectively,which improves the measurement accuracy of the surface shape and validates the correctness of the theoretical analysis and the effectiveness of the proposed reflectance correction algorithm.

关 键 词：面形测量 反射率修正 光谱共焦 峰值漂移 柱透镜 

分 类 号：O433.1[机械工程—光学工程]