大口径球面镜透过率测量系统控制技术  

Control Technology of Transmittance Measurement System for Large-Diameter Spherical Mirrors

作　　者：王佳豪 于信[1] 白素平[1] 韩佳昊 王杏月 贺国强 韩洁冰 Wang Jiahao;Yu Xin;Bai Suping;Han Jiahao;Wang Xingyue;He Guoqiang;Han Jiebing(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《激光与光电子学进展》2024年第17期188-195,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学基金青年基金资助(62205032);吉林省科技发展计划(20210201139GX);长春理工大学青年基金(XQNJJ-2019-01)。

摘　　要：由于高能激光系统中光学元件对于系统探测距离、毁伤能力以及能量损耗程度等参数都可以通过测量透过率来评估,采用共光路复合位移同步扫描技术,通过逐点扫描的方式实现对大口径元件透过率的测量。通过扫描圆周和径向的复合位移,控制上下机械扫描结构,结合振镜对光路的校准,从而实现全口径快速扫描。实验结果表明,所提方法测得光学元件透过率的测量精度为0.2%,测量口径最大600 mm,测量速度大于500 h^(-1),满足技术指标的要求,实现了对大口径激光元件透过率的高精度测量。Because the optical components in the high energy laser system can be evaluated by measuring the transmittance,such as the detection distance,damage ability and energy loss degree of the system,we used the common optical-path composite displacement synchronous-scanning technique via point-by-point scanning to determine the transmittance rate of large-diameter components.The upper and lower mechanical scanning structures are controlled to achieve fast scanning of the full aperture by composite displacement scanning in the circumferential and radial directions,combined with the calibration of the optical path using a galvanometer.The experimental results show that the measurement accuracy of optical element transmittance measured by the proposed method is 0.2%,the measurement aperture reaches up to 600 mm,and the measurement speed exceeds 500 h^(-1).These values satisfy the technical specification requirements and achieves high-precision measurements of transmittance of large-diameter laser components.

关 键 词：大口径球面镜 透过率 复合位移 同步控制 

分 类 号：TN407[电子电信—微电子学与固体电子学]