双U型单环谐振陀螺热弹性阻尼分析  

Thermoelastic damping analysis of double U-beam single ring resonator gyroscope

作　　者：王馨宇 魏雯强 蔡麒 曹慧亮[1] WANG Xinyu;WEI Wenqiang;CAI Qi;CAO Huiliang(Key Laboratory of Instrument Science and Dynamic Testing,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《中国惯性技术学报》2024年第10期1018-1024,共7页Journal of Chinese Inertial Technology

基　　金：国家自然科学基金(U2230206);国家重点研发计划(2022YFB3205000)。

摘　　要：对于MEMS环形谐振陀螺而言,品质因数是一个关键的技术指标,在真空条件下热弹性阻尼是影响品质因数的主要因素。因此,针对带有拓扑梳齿的双U型环形陀螺,首先分析了其结构形式和工作原理。其次研究了热弹性阻尼机理,对双U型环形陀螺热弹性阻尼进行了理论研究。同时借助有限元方法对热弹性阻尼进行了仿真分析,探索了结构参数对环形陀螺品质因数的影响。对不同结构参数的陀螺进行实验测试。仿真分析与实验测试结果表明,增加单环内径,减小单环环宽,减小中央圆盘的半径和减小支撑梁梁宽方式都可以降低陀螺热弹性阻尼,从而提高陀螺的品质因数。合理调整陀螺结构参数可以使陀螺品质因数在一定参数条件下达到十万量级。所提分析方法对降低热弹性阻尼,提高陀螺品质因数具有指导意义。For MEMS ring resonator gyro,the quality factor is a key technical index,and the thermoelastic damping is the main factor affecting the quality factor under vacuum condition.Therefore,aiming at a double U-beam ring gyro with topological comb teeth,the structure and working principle of the gyro are analyzed first.Second the thermoelastic damping mechanism is studied,and the thermoelastic damping of the double U-beam ring gyro is studied theoretically.At the same time,the thermoelastic damping of the gyro is simulated by finite element method,and the influence of structural parameters on the quality factor of the ring gyro is explored.The gyro with different structural parameters is tested.Simulation analysis and experimental test results show that increasing the inner diameter of a single ring,decreasing the ring width of a single ring,decreasing the radius of the central disk and decreasing the width of the supporting beam can reduce the thermoelastic damping of the gyro and improve the quality factor of the gyro.Reasonable adjustment of gyro structure parameters can make gyro quality factor reach 100,000 under certain parameters.The proposed analysis method has guiding significance for reducing thermoelastic damping and improving quality factor of gyro.

关 键 词：MEMS 环形谐振陀螺 双U型梁 热弹性阻尼 有限元分析 

分 类 号：TH89[机械工程—仪器科学与技术]