基于压电超声换能器的被动声学发展及应用综述  

A Comprehensive Review on the Development and Applications of Passive Acoustics Based on Piezoelectric Ultrasonic Transducers

作　　者：毛宇宸 沈建东 刘涛 杨嘉倩 豆涵杰 张汪洋 牟笑静 MAO Yuchen;SHEN Jiandong;LIU Tao;YANG Jiaqian;DOU Hanjie;ZHANG Wangyang;MU Xiaojing(National Defense Key Discipline laboratory of New Micro-Nano Devices and Systems Technology,Chongqing University,Chongqing 400044,China)

机构地区：[1]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044

出　　处：《压电与声光》2024年第5期617-633,643,共18页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划(2021YFB2012100)。

摘　　要：深入探讨了微电子机械系统(MEMS)在被动声学领域的应用,特别关注了压电效应、常用压电材料和传感结构设计三方面。阐述了压电效应的基本概念,介绍了石英、PZT(锆钛酸铅)和ZnO(氧化锌)等主要的压电材料,这些材料因其出色的压电特性而被广泛用于MEMS技术。同时详细分析了悬臂梁、薄膜等传感结构,这些结构能够高效地将声波能量转换为电信号。特别介绍了MEMS麦克风、MEMS水听器和MEMS声发射传感器3种具有代表性的MEMS声学器件,并详细说明其工作原理及其在不同领域的应用。最后对MEMS声学器件在消费电子、工业检测、环境监测、军事及医疗等领域的应用进行总结,并对其未来发展趋势进行了展望。This article delves into the applications of Micro-Electro-Mechanical Systems(MEMS)in the field of passive acoustics,with a particular focus on the principles of piezoelectricity,commonly used piezoelectric materials,and the design of sensing structures.The article begins by elucidating the fundamental concepts of piezoelectricity,followed by an introduction to several key piezoelectric materials such as quartz,PZT(lead zirconate titanate),and ZnO(zinc oxide),which are widely employed in MEMS technology due to their superior piezoelectric properties.Subsequently,the article thoroughly analyzes sensing structures like cantilever beams and thin films,which efficiently convert acoustic energy into electrical signals.The article also specifically introduces three representative MEMS acoustic devices:MEMS microphones,MEMS hydrophones,and MEMS acoustic emission sensors,detailing their working principles and applications across various domains.Finally,the article summarizes the applications of MEMS acoustic devices in fields such as consumer electronics,industrial inspection,environmental monitoring,military,and medical applications,and provides an outlook on their future development trends.

关 键 词：MEMS传感器 被动声学 压电材料 水下声学 工业监测 

分 类 号：TN384[电子电信—物理电子学] TN64TN912