一种抑制声表面波器件横向能量泄露结构及其应用  

Novel Structure for SuppressingTransverse Leakage in SAW Devices and Its Application

作　　者：李世国[1] 褚梦群 胡丞稷 郑泽渔[1] 杜雪松[1] 董加和[1] 陆川[1] 李桦林 陈彦光[1] 汪红兵 马晋毅[1] 肖强 LI Shiguo;CHU Mengqun;HU Chengji;ZHENG Zeyu;DU Xuesong;DONG Jiahe;LU Chuan;LI Hualin;CHEN Yanguang;WANG Hongbin;MA Jinyi;XIAO Qiang(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Science and Technology on Analog Integrated Circuit Laboratory,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]模拟集成电路重点实验室,重庆400060

出　　处：《压电与声光》2024年第5期680-684,共5页Piezoelectrics & Acoustooptics

摘　　要：采用42°YX-LiTaO_(3)基底的声表面波(SAW)滤波器、多工器易产生横向能量泄露效应,这种效应的产生会增大SAW器件的插损、缩减有效带宽、降低矩形度等。为了抑制声表面波的横向能量泄露,提出了一种假指加宽结构,并通过有限元仿真验证了该结构的有效性。将该结构应用于Band 40和Band 41 SAW滤波器设计中,实验结果表明,该结构在不增加任何工艺复杂度的情况下能有效抑制SAW器件的横向能量泄露,从而减小SAW器件的通带插损、增加有效带宽、提高矩形度等。该结构能够拓展应用于其他频段的SAW器件。Transverse leakage is a significant issue in Surface Acoustic Wave(SAW)filters and duplexers that utilize 42°YX-lithium tantalate(42LT)substrates.This leakage increases insertion loss,reduces bandwidth,and flattens the roll-off,negatively impacting the performance of SAW devices.In this paper,we propose a wider dummy structure to suppress transverse leakage.The effectiveness of this structure is verified through finite element method(FEM)simulations.Furthermore,we extend this wider dummy structure to Band 40 and Band 41 SAW filters.Experimental results demonstrate that the structure enables SAW devices to achieve lower insertion loss,broader bandwidth,and steeper roll-off characteristics.Additionally,this novel structure has the potential to be applied to other SAW filter bands.

关 键 词：声表面波器件 42°YX-LiTaO_(3) 横向能量泄露 假指加宽 

分 类 号：TN65[电子电信—电路与系统]