一种基于动态pMUT的距离与方向双向检测方法  

Bi-Directional Distance Detection Method Based on Dynamic pMUT

作　　者：陶金燕 李加东[2,3,5] 戴晔 商文玲[2,3,4] 王丹芮 冯昌坤 胡益民 姚术涛 塔桂峰 TAO Jinyan;LI Jiadong;DAI Ye;SHANG Wenling;WANG Danrui;FENG Changkun;HU Yimin;YAO Shutao;TA Guifeng(The College of Science,Shanghai University,Shanghai 200072,China;Suzhou Institute of Nano-Tech and Nano-Bionics(SINANO),Chinese Academy of Sciences,Suzhou 215123,China;Key Laboratory of Multifunctional Nanomaterials and Smart Systems,Chinese Academy of Sciences,Suzhou 215123,China;School of Nano-Tech and Nano-Bionics,University of Science and Technology of China,Hefei 230026,China;School of Mechanical and Electrical Engineering,Changchun University of Science and Technology,Changchun 130012,China)

机构地区：[1]上海大学理学院,上海200072 [2]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123 [3]中国科学院多功能材料与轻巧系统重点实验室,江苏苏州215123 [4]中国科学技术大学纳米技术与纳米仿生学院,安徽合肥230026 [5]长春理工大学机电工程学院,吉林长春130012

出　　处：《压电与声光》2024年第5期722-728,共7页Piezoelectrics & Acoustooptics

基　　金：苏州市科技计划项目(SSD2023001);国家自然基金项目(62074159);国家重点研发计划(2021YFB3201600)。

摘　　要：超声波传感器是移动机器人广泛采用的空间感知手段。为了提高空间感知范围,现有移动机器人常采取多传感器组合的方式,导致感知系统体积大、功耗高、系统复杂。提出了一种基于动态压电微机械超声换能器(pMUT)的检测方法,实现了单颗器件的双向检测功能,使测量范围在小体积、低功耗情况下获得成倍的增加。该方法利用压电薄膜双向振动的特点得到超声波双向回波信号,从而获取两个方向的测量距离。测试表明,使用该方法后单向测量范围基本不变,能准确测量两个方向上障碍物的距离,并在动态情况下反映障碍物对应方向。该方法有助于简化感知系统,有望在微型机器避障等方面发挥重要作用。Ultrasonic sensors are widely used inmobile robots for spatial perception.To extend the spatial perception range,current mobile robots often adopt a multi-sensor approach,resulting in a sensing system that is large in volume,high in power consumption,and complex in design.In this paper,wepropose a detection method based on a dynamic piezoelectric micromachined ultrasonic transducer(pMUT)that realizes bi-directional detection with a single device,effectively doubling the measurement range while maintaining a compact size and low power consumption.This method leverages the two-way vibration characteristics of the piezoelectric film to capture ultrasonic echoes in both directions,enabling distance measurements in two directions.Results indicate that the one-way measurement range remains unchanged with this method,while distances to obstacles in both directions can be accurately measured,reflecting their corresponding directions under dynamic conditions.This method simplifies the sensing system and is expected to play an important role in obstacle avoidance for measurement.

关 键 词：压电微机械超声换能器(pMUT) 双向检测 移动机器人 空间感知 测距 

分 类 号：TB552[理学—物理] TN384[理学—声学] TN92[电子电信—物理电子学]