计量型微米级X射线坐标测量机空间分辨力标准器的研制  

Development of Spatial Resolution Standard for Metrological Micron X-ray Coordinate Measuring Machine

作　　者：王云祥 王震 施玉书[2] 胡佳成 谭浩晨 方丹 付晨 黄红平 孙宝俊 王俊 WANG Yunxiang;WANG Zhen;SHI Yushu;HU Jiacheng;TAN Haochen;FANG Dan;FU Chen;HUANG Hongping;SUN Baojun;WANG Jun(Suzhou Institute of Metrology,Suzhou,Jiangsu 215126,China;National Institute of Metrology,Beijing 100029,China;Colloge of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang,310018,China)

机构地区：[1]苏州市计量测试院,江苏苏州215126 [2]中国计量科学研究院,北京100029 [3]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《计量学报》2024年第10期1480-1486,共7页Acta Metrologica Sinica

基　　金：江苏省市场监督管理局科研项目(KJ21125005)。

摘　　要：针对现有计量型X射线坐标测量机空间分辨力标准器无法溯源的问题,研发了新型可溯源的空间分辨力标准器,并对其校准方法进行了探索研究。首先,基于线对卡法,利用光刻和电感耦合等离子体(ICP)刻蚀工艺研制了可定期溯源栅格标准器。然后,通过扫描电子显微镜实现了标准器的量值溯源,得到标准器的栅格周期为4~40μm,结果的均匀性可达0.1%,满足目前计量型X射线坐标测量机空间分辨率溯源需求。最后,采用3D打印技术设计制备可拆卸的封装保护结构,便于标准器在产业中推广使用。上述方法有利于改善X射线坐标测量机等仪器的校准工作,提升现阶段的精度水平。Aiming at the problem that the spatial resolution standard of X-ray coordinate measuring machine cannot be traced,the development and calibration method of the spatial resolution standard of X-ray coordinate measuring machine are studied.Firstly,based on the wire-to-card method,a regularly traceable grid standard is developed by lithography and inductively coupled plasma(ICP)etching.Secondly,the measurement traceability of the standard is realized by scanning electron microscope.The grid period of standard are 4~40μm,and the uniformity is up to 0.1%,which can meet the current metrological X-ray coordinate measuring machine spatial resolution traceability requirements.Finally,the detachable package protection structure is designed and prepared by 3D printing technology,which is convenient for the popularization and use of the standard in the industry.The above method is helpful to improve the calibration work of X-ray coordinate measuring machine and improve the accuracy level at present.

关 键 词：几何量计量 X射线坐标测量机 射线空间分辨力 标准器 量值溯源 

分 类 号：TB92[一般工业技术—计量学]