高灵敏度声表面波温度传感器设计及制造  

Design and Manufacture of Surface Acoustic Wave Temperature Sensor with High Sensitivity

作　　者：朱赛宁 陈少康 陈培仓 王涛 ZHU Saining;CHEN Shaokang;CHEN Peicang;WANG Tao(Wuxi KI Electronics Co.,Ltd.,Wuxi 214000,China)

机构地区：[1]无锡中微晶园电子有限公司,江苏无锡214000

出　　处：《传感器世界》2024年第9期27-32,共6页Sensor World

摘　　要：针对无线无源声表面波温度传感器灵敏度差的问题,设计制作了一款中心频率为434.8 MHz的谐振式声表面波温度传感器。基于声表面波温度传感器的工作原理,以Y-X切型石英材料为衬底,设计了传感器芯片结构及工艺制备流程,通过圆片级丝网印刷方式涂覆吸声油墨降低旁瓣信号,有效提高了传感器的测试灵敏度和精准度。最后,对封装完的传感器性能进行研究分析,结果表明,通过对温度传感器结构及工艺优化,研制出的中心频率为434.8 MHz的谐振式声表面波温度传感器灵敏度达到 9.18 kHz/℃,非线性度达到0.003% FS,满足温度传感器的应用要求。A resonant surface acoustic wave temperature sensor with a central frequency of 434.8 MHz was designed and manufactured to solve the problem of poor sensitivity of the wireless passive surface acoustic wave temperature sensor.Based on the working principle of the SAW temperature sensor,the structure and the manufacturing process of the sensor were designed using Y-X cut quartz as substrates.The side lobe signal was reduced by applying sound-absorbing ink through wafer level screen printing,which effectively improved the sensitivity and accuracy of the sensor.Finally,the parameters of the packaged sensor were tested and analyzed.The results show that the 434.8 MHz surface acoustic wave temperature sensor has a sensitivity of 9.18 kHz/℃and a nonlinearity of±0.003%FS through optimizing the structure and process of the temperature sensor,which meets the application requirements of the temperature sensor.

关 键 词：声表面波 温度传感器 叉指换能器 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]