聚酰亚胺柔性基底红外隔热和保护膜的制备及性能分析  

Preparation and Performance Analysis of Infrared Thermal Insulation and Protective Film Based on Polyimide Flexible Substrate

作　　者：李卓霖 杨金也 付秀华[3,4] 张静[3,4] 董所涛 韩阳 LI Zhuolin;YANG Jinye;FU Xiuhua;ZHANG Jing;DONG Suotao;HAN Yang(Jilin Provincial Institute of Education,Changchun 130022,China;Hangzhou Multi IR Technology Co.,Ltd,Hangzhou 310018,China;School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Zhongshan Institute,Changchun University of Science and Technolog y,Zhongshan 528437,Guangdong Province,China;Beijing Golden Way Scientific Co.,Ltd,Beijing 100015,China)

机构地区：[1]吉林省教育学院,长春130022 [2]杭州麦乐克科技股份有限公司,杭州310018 [3]长春理工大学光电工程学院,长春130022 [4]长春理工大学中山研究院,广东中山528437 [5]北京欧普特科技有限公司,北京100015

出　　处：《吉林大学学报（理学版）》2024年第6期1464-1470,共7页Journal of Jilin University:Science Edition

基　　金：国家自然科学基金(批准号:11973040);中山市引进创新团队项目(批准号:CXTD2023008).

摘　　要：针对聚酰亚胺具有抗高温、易弯折可贴敷、良好的机械延展性和拉伸强度等特性,在125μm厚的柔性聚酰亚胺材料上制备红外隔热和保护膜.在制备过程中,通过对离子源的能量调控可提高柔性基底表面膜层的附着力,根据最小二乘法原理构建薄膜材料光学常数和温度间的关系式,以解决温度变化对薄膜光学性能的影响.在类金刚石薄膜沉积中,采用预热处理法以解决柔性基底变形导致膜厚均匀性较差的问题.红外光谱检测和分析表明,在聚酰亚胺基底上制备的红外隔热薄膜满足使用要求.Polyimide had the characteristics such as resistance to high temperatures,flexibility,easy adhesion,good mechanical extensibility and tensile strength,we prepared infrared thermal insulation and protective films on a flexible polyimide material with a thickness of 125μm.During the preparation process,the adhesion of the film layer on the flexible substrate could be improved by adjusting the energy of the ion source.Based on the principle of least squares,a relationship formula was establ ished between the optical constants of the film material and temperature to solve the influence of temperature changes on the optical performance of the thin fi lm.In the deposition of diamond-like carbon(DLC)film,the preheating method was used to solve the problem of uneven film thickness caused by the deformatio n of the flexible substrate.The infrared spectroscopy detection and analysis show that the infrared thermal insulation film prepared on the polyimide substrate meets the usage requirements.

关 键 词：红外薄膜 聚酰亚胺 柔性基底 类金刚石薄膜 制备工艺 

分 类 号：O43[机械工程—光学工程]