基于铂电极MEMS平台图案化的柔性葡萄糖传感器制备研究  

Study on preparation of a flexible glucose sensor based on patterning of platinum electrode MEMS platform

作　　者：成乾飞 梅晓刚 李菲 鲁思渊 CHENG Qianfei;MEI Xiaogang;LI Fei;LU Siyuan(Faculty of Mechanical Engineering&Mechanics,Ningbo University,Ningbo 315211,China;Institute of Flexible Electronics Technology of THU,Jiaxing 314000,China;School of Electromechanical and Rail Transit,Zhejiang Fashion Institute of Technology,Ningbo 315211,China;School of Mechanical Engineering,Yanshan University,Qinhuangdao 066004,China)

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211 [2]浙江清华柔性电子技术研究院,浙江嘉兴314000 [3]浙江纺织服装职业技术学院机电与轨道交通学院,浙江宁波315211 [4]燕山大学机械工程学院,河北秦皇岛066004

出　　处：《宁波大学学报（理工版）》2024年第6期67-72,共6页Journal of Ningbo University：Natural Science and Engineering Edition

基　　金：国家自然科学基金(12172184)。

摘　　要：随着柔性电子技术在医疗领域的快速发展,人体葡萄糖浓度监测生物传感器的柔性化已成为提高其应用优势的必要手段.结合磁控溅射方法与微机电系统加工技术,在聚酰亚胺基底上设计和制备了铂基柔性可穿戴葡萄糖-温度传感器.检测线性范围为1.9μmol·L^(-1)~1.055mmol·L^(-1),最低检测限为1.8μmol·L^(-1).所制备的柔性葡萄糖传感器在人体汗液葡萄糖监测中表现出优异的响应跟随性.With the rapid development of flexible devices in medical field,flexibility has become a must in extending the application of glucose biosensors for human glucose concentration monitoring.In the current work,a Pt-based flexible glucose-temperature sensor was designed and prepared on the polyimide substrate by combining magnetron sputtering method with Micro-Electro-Mechanical System(MEMS) processing technology.The detection linear range is 1.9 μmol·L^(-1)~1.055 mmol·L^(-1),and the limit of detection(LOD) is 1.8 μmol·L^(-1).The prepared flexible glucose sensor exhibits excellent responding performance in human sweat glucose monitoring.

关 键 词：葡萄糖 柔性 聚酰亚胺(PI) 铂(Pt) 电化学检测 微机电系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]