基于反射式空间光调制器的非球面面形干涉检测方法设计  

Design of Aspheric Surface Interference Testing Method Based on Reflective Spatial Light Modulator

作　　者：刘嘉晖 陈福春[1,2] 金钢 胡凯[1] 丛海佳 LIU Jia-hui;CHEN Fu-chun;JIN Gang;HU Kai;CONG Hai-jia(Shanghai Institute of Physics for Technology,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]中国科学院大学,北京100049

出　　处：《科学技术与工程》2024年第31期13262-13268,共7页Science Technology and Engineering

基　　金：上海市浦江人才计划(23PJ1414800)。

摘　　要：目前光学系统中非球面数量多,针对各个非球面单独做补偿器检测面形加工成本高、通用性不好、加工难度大,为解决对多个参数不同的非球面需要不同的补偿器的问题,提出了一种基于空间光调制器(spatial light modulator,SLM)作为补偿器的干涉面形检测方法,该干涉检测法采用反射式空间光调制器作为零位补偿器,结合偏振分光镜和波片建立检测光路,可以实现对非球面面形误差的测量。通过在ZEMAX上模拟一个两表面皆为凹非球面的场镜的检测光路,对该干涉检测方法进行了验证,并在MATLAB中仿真分析了SLM的波前调制误差。仿真结果表明,该方法可以实现对不同非球面面形的检测,设计光路中的波前调制精度可达0.0083λ。At present,there is a large number of aspherical surfaces in the optical systems.However,making separate compensators to detect each aspherical surface is costly,lack versatility,and faces processing challenges.To solve the problem that different compensators are needed for various aspherical surfaces with different parameters,a method of interferometric surface test put was forward by using spatial light modulator(SLM)as a null-test compensator.This method combined a polarizing beam splitter and waveplates to construct a testing optical path,so as to achieve the measurement of aspheric surface errors.The interferometric testing method was validated by simulating the testing optical path of a field lens with concave aspherical surfaces on both surfaces on ZEMAX.In the meantime,the wavefront modulation error of SLM was simulated and analyzed through MATLAB.The simulation results indicate that the method can test different aspheric surface errors,and the wavefront modulation accuracy within the designed optical path reaches up to 0.0083λ.

关 键 词：空间光调制器 干涉检测 非球面检测 ZEMAX 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]