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作 者:李峰 崔首龙 史言回 韩锋 王艳飞[2] Li Feng;Cui Shoulong;Shi Yanhui;Han Feng;Wang Yanfei(Jiangsu Xinhua Semiconductor Technology Co.,Ltd.,Jiangsu,221008;School of Chemical Engineering and Technology,China University of Mining and Technology,Jiangsu,221116)
机构地区:[1]江苏鑫华半导体科技股份有限公司,江苏221008 [2]中国矿业大学化工学院,江苏221116
出 处:《当代化工研究》2024年第20期38-40,共3页Modern Chemical Research
基 金:江苏省安全学科群“双一流”省补创新项目子课题“工业危化品储运安全保障技术”(项目编号:AQQ-SYLSB2003-OX)。
摘 要:鉴于多晶硅还原炉有发生应力腐蚀开裂的风险,本文应用超声冲击处理对在役还原炉进行消应力处理,并研究打磨降低粗糙度防止挂污、藏水和高温运行1个月对残余应力的影响。结果表明,超声冲击处理能有效降低在役还原炉焊缝的残余应力,使部分区域应力转为压应力,而打磨对残余应力的影响不大,但超声冲击处理后高温运行会导致应力释放,使超声冲击的有益效果降低,但整体上焊缝仍保持在较低的残余应力水平。Given the risk of stress corrosion cracking in polycrystalline silicon reduction furnaces,this study applied ultrasonic impact treatment to in-service reduction furnaces for residual stress relief.It also investigated the effects of polishing to reduce roughness,prevent contamination and water retention,and high-temperature operation for one month on residual stress.The results show that ultrasonic impact treatment effectively reduces the residual stress in the welds of in-service reduction furnaces,converting stress in some areas to compressive stress.Polishing has minimal impact on residual stress,but high-temperature operation after ultrasonic impact treatment leads to stress release,which diminishes the beneficial effects of ultrasonic impact.Nevertheless,the welds generally maintain a lower residual stress level.
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